公开(公告)号：US20140210050A1

公开(公告)日：2014-07-31

申请号：US13972844

申请日：2013-08-21

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Seong-Min Wang ,  Mu-Gyeom Kim ,  Tae-An Seo ,  Gug-Rae Jo ,  Dae-Young Lee ,  Jung-Gun Nam ,  Dae-Hwan Jang

IPC: H01L49/02

CPC classification number: H01L28/88 ,  G02F1/136213 ,  H01L27/1255 ,  H01L27/3265

Abstract: Provided is a method of manufacturing a capacitor of a display apparatus, the display apparatus being formed on a substrate and including a thin film transistor, which includes an active layer, a gate electrode, and source and drain electrodes, a display device connected to the thin film transistor, and the capacitor, the method including: forming an electrode layer on the substrate; forming a passivation layer on the electrode layer; patterning the passivation layer to form a first pattern including first branch patterns parallel to each other, and a second pattern including second branch patterns parallel to each other and interposed between the first branch patterns; and forming first and second electrodes by etching the electrode layer using the first and second patterns as masks.

Abstract translation: 提供一种制造显示装置的电容器的方法，所述显示装置形成在基板上并且包括薄膜晶体管，所述薄膜晶体管包括有源层，栅极电极和源极和漏极，显示装置连接到 薄膜晶体管和电容器，所述方法包括：在所述基板上形成电极层; 在所述电极层上形成钝化层; 图案化钝化层以形成包括彼此平行的第一分支图案的第一图案，以及包括彼此平行并插入在第一分支图案之间的第二分支图案的第二图案; 以及通过使用第一和第二图案作为掩模蚀刻电极层来形成第一和第二电极。