MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND METHOD FOR CONTROLLING A MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS
    21.
    发明申请
    MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS AND METHOD FOR CONTROLLING A MICROELECTROMECHANICAL DEVICE HAVING AN OSCILLATING MASS 有权
    具有振荡质量的微电子设备和用于控制具有振荡质量的微电子设备的方法

    公开(公告)号:US20130249642A1

    公开(公告)日:2013-09-26

    申请号:US13904847

    申请日:2013-05-29

    CPC classification number: H03B5/30 G01C19/56 H03L3/00

    Abstract: A microelectromechanical device includes a body, a movable mass, elastically connected to the body and movable in accordance with a degree of freedom, and a driving device, coupled to the movable mass and configured to maintain the movable mass in oscillation at a steady working frequency in a normal operating mode. The microelectromechanical device moreover includes a start-up device, which is activatable in a start-up operating mode and is configured to compare a current oscillation frequency of a first signal correlated to oscillation of the movable mass with a reference frequency, and for deciding, on the basis of the comparison between the current oscillation frequency and the reference frequency, whether to supply to the movable mass a forcing signal packet so as to transfer energy to the movable mass.

    Abstract translation: 微机电装置包括主体,可移动质量体,弹性地连接到主体并且可以根据自由度移动;以及驱动装置,其联接到可移动质量块,并且被配置为将可移动质量块稳定在稳定的工作频率 在正常的操作模式。 微机电装置还包括启动装置,其可以在启动操作模式下激活,并且被配置为将与可移动质量块的振荡相关的第一信号的当前振荡频率与参考频率进行比较, 基于当前振荡频率和参考频率之间的比较,是否向可移动质量块施加强制信号分组,以将能量传递到可移动质量块。

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