公开(公告)号：US12134556B2

公开(公告)日：2024-11-05

申请号：US17534286

申请日：2021-11-23

Applicant: STMICROELECTRONICS S.R.L. ,  STMicroelectronics International N.V.

Inventor： Enri Duqi ,  Lorenzo Baldo ,  Paolo Ferrari ,  Benedetto Vigna ,  Flavio Francesco Villa ,  Laura Maria Castoldi ,  Ilaria Gelmi

IPC: B81B7/00

Abstract: A semiconductor device includes: a substrate; a transduction microstructure integrated in the substrate; a cap joined to the substrate and having a first face adjacent to the substrate and a second, outer, face; and a channel extending through the cap from the second face to the first face and communicating with the transduction microstructure. A protective membrane made of porous polycrystalline silicon permeable to aeriform substances is set across the channel.

公开(公告)号：US20220169498A1

公开(公告)日：2022-06-02

申请号：US17534286

申请日：2021-11-23

Applicant: STMICROELECTRONICS S.R.L. ,  STMicroelectronics International N.V.

Inventor： Enri DUQI ,  Lorenzo BALDO ,  Paolo FERRARI ,  Benedetto Vigna ,  Flavio Francesco VILLA ,  Laura Maria CASTOLDI ,  Ilaria GELMI

IPC: B81B7/00

Abstract: A semiconductor device includes: a substrate; a transduction microstructure integrated in the substrate; a cap joined to the substrate and having a first face adjacent to the substrate and a second, outer, face; and a channel extending through the cap from the second face to the first face and communicating with the transduction microstructure. A protective membrane made of porous polycrystalline silicon permeable to aeriform substances is set across the channel.

公开(公告)号：US10353020B2

公开(公告)日：2019-07-16

申请号：US15013562

申请日：2016-02-02

Applicant: STMicroelectronics S.r.l.

Inventor： Dario Paci ,  Sarah Zerbini ,  Benedetto Vigna

IPC: G01R33/00 ,  G01R33/09 ,  G01R33/02

Abstract: A method of manufacturing a magnetic-field sensor includes forming an insulating layer on a first surface of a substrate. First and second magnetoresistors are formed at different above the first surface of the substrate and are spaced apart from the first surface by different distances. The first and second magnetoresistors have respective main axes of magnetization transverse to one another, and respective secondary axes of magnetization transverse to one another. The method further includes forming a first magnetic-field generator configured to generate a first magnetic field having field lines along the main axis of magnetization of the first magnetoresistor, and forming a second magnetic-field generator configured to generate a second magnetic field having field lines along the main axis of magnetization of the second magnetoresistor.

公开(公告)号：US09753279B2

公开(公告)日：2017-09-05

申请号：US14564237

申请日：2014-12-09

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics International N.V.

Inventor： Benedetto Vigna ,  Marco Ferrera ,  Sonia Costantini ,  Marco Salina

IPC: G02B26/08 ,  H04N9/31 ,  H02N1/00 ,  B81B3/00 ,  G02B27/10

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  B81B2201/042 ,  B81B2203/0154 ,  B81C1/00198 ,  G02B27/1006 ,  H02N1/002 ,  H02N1/006 ,  H04N9/3129 ,  H04N9/3135 ,  Y10T29/49002

Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.

公开(公告)号：US20140202453A1

公开(公告)日：2014-07-24

申请号：US14225285

申请日：2014-03-25

Applicant: STMicroelectronics S.r.l.

Inventor： Angelo Antonio Merassi ,  Angelo Pesci ,  Benedetto Vigna ,  Ernestino Galeazzi ,  Marco Mantovani

IPC: A61M15/00

CPC classification number: A61M15/009 ,  B05B1/14 ,  B05B17/0638 ,  B05D7/00 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00087 ,  Y10T29/49401

Abstract: A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.

Abstract translation: 一种喷雾装置的喷嘴膜的制造方法，其特征在于，包括以下步骤：在所述基材上形成膜层，在所述膜层上形成膜层，在所述膜层中形成多个喷嘴，在所述基材中形成多个供给流路， 供应通道在垂直方向上基本上对准多个喷嘴中的相应喷嘴并与相应喷嘴直接连通。

公开(公告)号：US08721910B2

公开(公告)日：2014-05-13

申请号：US13754510

申请日：2013-01-30

Applicant: STMicroelectronics S.r.l.

Inventor： Angelo Antonio Merassi ,  Angelo Pesci ,  Benedetto Vigna ,  Ernestino Galeazzi ,  Marco Mantovani

IPC: B44C1/22

CPC classification number: A61M15/009 ,  B05B1/14 ,  B05B17/0638 ,  B05D7/00 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00087 ,  Y10T29/49401

Abstract: A process for manufacturing a membrane of nozzles of a spray device, comprising the steps of laying a substrate, forming a membrane layer on the substrate, forming a plurality of nozzles in the membrane layer, forming a plurality of supply channels in the substrate, each supply channel being substantially aligned in a vertical direction to a respective nozzle of the plurality of nozzles and in direct communication with the respective nozzle.

Abstract translation: 一种喷雾装置的喷嘴膜的制造方法，其特征在于，包括以下步骤：在所述基材上形成膜层，在所述膜层上形成膜层，在所述膜层中形成多个喷嘴，在所述基材中形成多个供给流路， 供应通道在垂直方向上基本上对准多个喷嘴中的相应喷嘴并与相应喷嘴直接连通。