公开(公告)号：US20180019726A1

公开(公告)日：2018-01-18

申请号：US15638809

申请日：2017-06-30

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Sung HAN ,  Jae Chang LEE ,  Won HAN ,  Tae Yoon KIM ,  Jong Woon KIM ,  Tae Kyung LEE ,  Moon Chul LEE ,  Tae Hun LEE ,  Sung Min CHO ,  In Young KANG

IPC: H03H9/10 ,  H03H9/02 ,  H03H9/17 ,  H03H9/54

CPC classification number: H03H9/1014 ,  H03H9/02086 ,  H03H9/02102 ,  H03H9/02118 ,  H03H9/02157 ,  H03H9/172 ,  H03H9/173 ,  H03H9/54

Abstract: A bulk acoustic wave resonator device includes: a substrate; a lower electrode disposed on the substrate; a piezoelectric layer disposed over a portion of the lower electrode; an upper electrode disposed on the piezoelectric layer; and a shape control layer covering an edge of a cavity disposed between the substrate and the lower electrode, wherein tensile stress is applied to the shape control layer during formation of the shape control layer.

公开(公告)号：US20170003187A1

公开(公告)日：2017-01-05

申请号：US15045684

申请日：2016-02-17

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Chang Hyun LIM ,  Dae Hun JEONG ,  Tae Hun LEE

IPC: G01L9/00

CPC classification number: G01L9/0054 ,  G01L9/0047

Abstract: A pressure sensor element includes a die; a concave groove formed in one surface of the die; a partition wall formed in the concave groove to be spaced apart from side walls, the partition wall partitioning the concave groove into a trench and a cavity; and a membrane formed on the die and covering the concave groove.

Abstract translation: 压力传感器元件包括模具; 形成在模具的一个表面中的凹槽; 形成在所述凹槽中与侧壁间隔开的分隔壁，所述分隔壁将所述凹槽分隔成沟槽和空腔; 以及形成在模具上并覆盖凹槽的膜。

公开(公告)号：US20160273985A1

公开(公告)日：2016-09-22

申请号：US14933043

申请日：2015-11-05

Applicant: Samsung Electro-Mechanics Co., Ltd.

Inventor： Tae Hun LEE ,  Chang Hyun LIM ,  June Kyoo LEE ,  Dae Hun JEONG

IPC: G01L9/00

CPC classification number: G01L9/0054 ,  G01L19/0618

Abstract: A pressure sensor includes a sensor, an elastic support portion, a membrane, and a pressure detector. The sensor is accommodated in a frame of a base substrate. The elastic support portion is elastically connecting the sensor to the frame. The membrane is disposed on a surface of the sensor. The pressure detector is disposed on the membrane and configured to detect a variation in pressure based on a movement of the membrane.

Abstract translation: 压力传感器包括传感器，弹性支撑部分，膜和压力检测器。 传感器容纳在基底的框架中。 弹性支撑部分将传感器弹性地连接到框架。 膜设置在传感器的表面上。 压力检测器设置在膜上并且被配置为基于膜的移动来检测压力变化。