公开(公告)号：US20140009862A1

公开(公告)日：2014-01-09

申请号：US13751977

申请日：2013-01-28

Applicant: Qualcomm Incorporated

Inventor： JE-HSIUNG LAN ,  Evgeni P. Gousev ,  Wenyue Zhang ,  Manish Kothari ,  Sang-June Park

IPC: H01G7/00

CPC classification number: H01G7/00 ,  H01G5/16 ,  H01P1/127 ,  Y10T29/435

Abstract: Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable layer located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.

Abstract translation: 描述了具有可调谐共振频率并且能够处理大信号的可调谐MEMS谐振器。 在一个示例性设计中，可调谐MEMS谐振器包括（i）具有空腔和柱的第一部分和（ii）与第一部分配合并且包括位于柱下方的可移动层的第二部分。 每个部分可以在面向另一部分的表面上被金属层覆盖。 可移动板可通过DC电压机械地移动以改变MEMS谐振器的谐振频率。 空腔可以具有矩形或圆形形状，并且可以是空的或者用电介质材料填充。 柱可以位于腔的中间。 可移动板可以经由锚固件附接到第二部件（i）并作为悬臂操作，或者（ii）经由两个锚定件并作为桥梁操作。

公开(公告)号：US20140009249A1

公开(公告)日：2014-01-09

申请号：US13751455

申请日：2013-01-28

Applicant: QUALCOMM INCORPORATED

Inventor： Sang-June Park

IPC: H03H9/02 ,  H03H9/46

CPC classification number: H03H9/02244 ,  E05Y2900/402 ,  H01P1/127 ,  H01P1/2084 ,  H03H9/462

Abstract: Tunable MEMS resonators having adjustable resonance frequency and capable of handling large signals are described. In one exemplary design, a tunable MEMS resonator includes (i) a first part having a cavity and a post and (ii) a second part mated to the first part and including a movable layer located under the post. Each part may be covered with a metal layer on the surface facing the other part. The movable plate may be mechanically moved by a DC voltage to vary the resonance frequency of the MEMS resonator. The cavity may have a rectangular or circular shape and may be empty or filled with a dielectric material. The post may be positioned in the middle of the cavity. The movable plate may be attached to the second part (i) via an anchor and operated as a cantilever or (ii) via two anchors and operated as a bridge.

Abstract translation: 描述了具有可调谐共振频率并且能够处理大信号的可调谐MEMS谐振器。 在一个示例性设计中，可调谐MEMS谐振器包括（i）具有空腔和柱的第一部分和（ii）与第一部分配合并且包括位于柱下方的可移动层的第二部分。 每个部分可以在面向另一部分的表面上被金属层覆盖。 可移动板可通过DC电压机械地移动以改变MEMS谐振器的谐振频率。 空腔可以具有矩形或圆形形状，并且可以是空的或者用电介质材料填充。 柱可以位于腔的中间。 可移动板可以经由锚固件附接到第二部件（i）并作为悬臂操作，或者（ii）经由两个锚定件并作为桥梁操作。