MEMS AIRFLOW SENSOR DIE INCORPORATING ADDITIONAL CIRCUITRY ON THE DIE
    21.
    发明申请
    MEMS AIRFLOW SENSOR DIE INCORPORATING ADDITIONAL CIRCUITRY ON THE DIE 有权
    MEMS空气流量传感器配套在DIE上的附加电路

    公开(公告)号:US20130055826A1

    公开(公告)日:2013-03-07

    申请号:US13226264

    申请日:2011-09-06

    CPC classification number: G01F1/6845 G01F1/692 G01F1/698 G01F15/02

    Abstract: A MEMS airflow sensor die having a heater control circuit, differential instrumentation amplifier, temperature compensation, and/or offset correction circuitry integrated with an airflow sensor on the MEMS die. The added circuitry may be placed on space available on the basic airflow die with MEMS fabrication techniques without enlarging the sensor die. The die with the added circuitry may result in a device having a reduced form factor, improved reliability and lower cost.

    Abstract translation: 具有与MEMS管芯上的气流传感器集成的加热器控制电路,差分仪表放大器,温度补偿和/或偏移校正电路的MEMS气流传感器管芯。 添加的电路可以放置在具有MEMS制造技术的基本气流模具上可用的空间上,而不需要扩大传感器芯片。 具有附加电路的裸片可能导致具有减小的形状因数,改进的可靠性和更低成本的器件。

    FLOW SENSOR WITH ENHANCED FLOW RANGE CAPABILITY
    22.
    发明申请
    FLOW SENSOR WITH ENHANCED FLOW RANGE CAPABILITY 有权
    流量传感器具有增强的流量范围能力

    公开(公告)号:US20120192643A1

    公开(公告)日:2012-08-02

    申请号:US13018017

    申请日:2011-01-31

    CPC classification number: G01F1/6842 G01F1/6845 G01F5/00 G01F15/185

    Abstract: Flow sensor assemblies having increased flow range capabilities are disclosed. In one illustrative embodiment, a flow sensor assembly includes a housing with an inlet flow port, an outlet flow port, and a fluid channel extending between the inlet flow port and the outlet flow port. One or more partitions are provided in the fluid channel of the housing to define two or more fluid sub-passages. A flow sensor, for sensing a measure related to a flow rate of a fluid flowing through the fluid channel, is positioned in one of the two or more fluid sub-passages. In some cases, the cross-sectional area of each of the two or more fluid sub-passages may be substantially the same, but this is not required. The housing may be formed from a single molded part defining the inlet and outlet flow ports, at least a portion of the fluid channel, and one or more of the partitions. In this case, a top cover may be provided and mounted to the housing to define the remaining portion of the fluid channel, if desired.

    Abstract translation: 公开了具有增加的流量范围能力的流量传感器组件。 在一个示例性实施例中,流量传感器组件包括具有入口流动端口,出口流动端口和在入口流动端口和出口流动端口之间延伸的流体通道的壳体。 一个或多个分隔件设置在壳体的流体通道中以限定两个或更多个流体分通道。 用于感测与流过流体通道的流体的流量相关的测量的流量传感器位于两个或更多个流体分通道中的一个中。 在一些情况下,两个或更多个流体子通道中的每一个的横截面面积可以基本上相同,但是这不是必需的。 壳体可以由限定入口和出口流动端口,流体通道的至少一部分以及一个或多个隔板的单个模制部件形成。 在这种情况下,如果需要,顶盖可以设置并安装到壳体以限定流体通道的剩余部分。

    Thermal anemometer flow sensor apparatus with a seal with conductive interconnect
    23.
    发明授权
    Thermal anemometer flow sensor apparatus with a seal with conductive interconnect 有权
    热风速计流量传感器设备,带有导电互连的密封

    公开(公告)号:US07891238B2

    公开(公告)日:2011-02-22

    申请号:US12388670

    申请日:2009-02-19

    CPC classification number: G01F1/6845 G01F1/692 G01F15/14

    Abstract: A flow sensor apparatus and method. A seal with a conductive interconnect is provided that includes a mass flow sense element mounted to a housing containing a thick film and/or thin film bridge structure for sensing media (e.g., mass flow) within a flow tube. The seal effectively isolates wirebond pads and electrical connections from the sensed media. The media, whether liquid or gas, can contain ionics that eventually contaminate the top of the mass flow sense element. The use of the seal with the conductive interconnect thus seals off the electrical connections and prevents exposure to the sensed media.

    Abstract translation: 流量传感器装置及方法。 提供具有导电互连件的密封件,其包括安装到壳体上的质量流量感测元件,该壳体包含用于感测流管内的介质(例如,质量流)的厚膜和/或薄膜桥结构。 密封有效地将引线键和电气连接与感测到的介质隔离。 液体或气体的介质可以含有最终污染质量流量感测元件顶部的离子。 因此,使用导电互连的密封件密封电连接并防止暴露于所感测的介质。

    Filled dielectric on metal pressure sensor
    24.
    发明授权
    Filled dielectric on metal pressure sensor 有权
    金属压力传感器上的填充电介质

    公开(公告)号:US07647833B1

    公开(公告)日:2010-01-19

    申请号:US12194339

    申请日:2008-08-19

    CPC classification number: G01L9/0044 G01L9/0052

    Abstract: A pressure sensing apparatus (1) includes an elastically deformable pressure-sensitive diaphragm assembly (13) having a pressure-sensitive metal or metal alloy diaphragm (14). A functional filled dielectric layer (25) is on the diaphragm and includes a base dielectric material and at least one CTE raising filler. A CTE of the functional filled dielectric layer provides a CTE @ 800° C.≧8 ppm/° C., such as ≧10 ppm/° C. A plurality of piezoresistive elements (27) are on the functional filled dielectric layer (25).

    Abstract translation: 压力传感装置(1)包括具有压敏金属或金属合金膜片(14)的可弹性变形的压敏膜组件(13)。 功能填充介电层(25)位于隔膜上,并包括基底电介质材料和至少一个CTE提升填料。 功能填充的介电层的CTE提供了800℃C = 8ppm /℃,例如> = 10ppm /℃。多个压阻元件(27)在功能填充的介电层上 (25)。

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