公开(公告)号：US06328620B1

公开(公告)日：2001-12-11

申请号：US09205197

申请日：1998-12-04

Applicant: Yongjun Jeff Hu

Inventor： Yongjun Jeff Hu

IPC: H01J904

CPC classification number: H01J9/025 ,  H01J2201/30407

Abstract: An emission site for a large area passive matrix cold cathode field emission display having an emission tip with a sharp profile is disclosed. A metallic film formed of iridium silicide (IrSi) is used to coat the tip. By using IrSi the tips of the emission sites can be formed at low temperatures. In addition, IrSi is a fine grain material that maintains a sharp profile and can be formed in a layer as thin as 100 Å.

公开(公告)号：US06263045B1

公开(公告)日：2001-07-17

申请号：US09489125

申请日：2000-01-21

Applicant: Don Mark Lipkin ,  Thomas Robert Raber

Inventor： Don Mark Lipkin ,  Thomas Robert Raber

IPC: H01J904

CPC classification number: H01J35/06

Abstract: A x-ray tube comprises a cathode cup assembly. The cathode cup assembly comprises a filament positioned in a cathode cup. A surface of the cathode cup assembly is exposed to incident infrared radiation, and the surface is adapted to reflect a substantial portion of the incident radiation, in which the radiation has a wavelength in a range from about 0.2 &mgr;m to about 5.0 &mgr;m.

Abstract translation: X射线管包括阴极杯组件。 阴极杯组件包括位于阴极杯中的细丝。 阴极杯组件的表面暴露于入射的红外辐射，并且该表面适于反射入射辐射的大部分，其中辐射具有在约0.2μm至约5.0μm的范围内的波长。

公开(公告)号：US06171165B2

公开(公告)日：2001-01-09

申请号：US09197092

申请日：1998-11-19

Applicant: Ho-Seob Kim ,  Kim Y. Lee ,  T. H. P. Chang

Inventor： Ho-Seob Kim ,  Kim Y. Lee ,  T. H. P. Chang

IPC: H01J904

CPC classification number: H01J9/18 ,  H01J37/067 ,  H01J2201/304 ,  H01J2237/1501

Abstract: A method and an accompanied apparatus for aligning an electron emitter with an extractor hole of a microcolumn. Four V-grooves, defined together with the window for forming the membrane and having bottoms situated on two axis are microfabricated on a chip. The axis intersect at a right angle and defines a center point for the extractor hole. The V-grooves are then used as references to align the electron emitter with the extractor hole, one axis at a time. The emitter is precisely aligned to the extractor hole because the extractor hole was formed with reference to the V-grooves. The thickness of the chip is used as the spacing reference between the emitter and the extractor.

公开(公告)号：US06171164B2

公开(公告)日：2001-01-09

申请号：US09026243

申请日：1998-02-19

Applicant: Aaron R. Wilson

Inventor： Aaron R. Wilson

IPC: H01J904

CPC classification number: H01J9/025

Abstract: A method of forming emitter tips for use in a field emission array is disclosed. The tips are formed by utilizing a polymer residue that forms during the dry etch sharpening step to hold the mask caps in place on the emitter tips. The residue polymer continues to support the mask caps as the tips are over-etched, enabling the tips to be etched past sharp without losing their shape and sharpness. The dry etch utilizes an etchant comprised of fluorine and chlorine gases. The mask caps and residue polymer are easily removed after etching by washing the wafers in a wash of deionized water, or Buffered Oxide Etch.

Abstract translation: 公开了一种形成用于场致发射阵列的发射极尖端的方法。 尖端通过利用在干蚀刻锐化步骤期间形成的聚合物残余物形成，以将掩模帽保持在发射器尖端上的适当位置。 当尖端被过蚀刻时，残余聚合物继续支撑掩模帽，使得尖端能够被锐利地蚀刻而不会损失它们的形状和锐度。 干蚀刻使用由氟和氯气组成的蚀刻剂。 通过在去离子水或缓冲氧化物蚀刻的洗涤中洗涤晶片，蚀刻后容易除去掩模盖和残余聚合物。

公开(公告)号：US06706386B2

公开(公告)日：2004-03-16

申请号：US10272602

申请日：2002-10-16

Applicant: Joel M. Frendt

Inventor： Joel M. Frendt

IPC: H01J904

CPC classification number: B82Y30/00 ,  B82Y10/00 ,  G02F1/13394 ,  H01J9/025 ,  Y10S438/945 ,  Y10T428/24372 ,  Y10T428/25 ,  Y10T428/252 ,  Y10T428/256

Abstract: A process for forming an etch mask having a discontinuous regular pattern utilizes beads, each of which has a substantially unetchable core covered by a removable spacer coating. Beads which have a core and a spacer coating are dispensed as a hexagonally-packed monolayer onto a thermo-adhesive layer, which is on a target layer. The beads are kept in place by a bead confinement wall. Following a vibrational step which facilitates hexagonal packing of the beads, the resultant assembly is heated so that the beads adhere to the adhesive layer. Excess beads are then discarded. Spacer shell material is then removed from each of the beads, leaving core etch masks. The core-masked target layer is then plasma etched to form a column of target material directly beneath each core. The cores and any spacer material underneath the cores are removed. The resulting circular island of target material may be used as an etch mask during wet isotropic etching of an underlying layer. Such a combination of plasma etching using the bead cores as a primary mask and a wet etch using the islands formed by the plasma etch as a secondary mask may be used to form micropoint cathode emitter tips in an underlying conductive or semiconductive layer.

Abstract translation: 用于形成具有不连续规则图案的蚀刻掩模的方法使用珠，其中每个具有由可移除的间隔物涂层覆盖的基本上不可取的芯。 具有芯和间隔层的珠粒作为六边形填充单层分配到目标层上的热粘合层上。 珠子通过小珠限制壁保持在适当位置。 在促进珠的六边形填充的振动步骤之后，加热所得组件，使得珠粘附到粘合剂层。 然后丢弃多余的珠子。 然后从每个珠粒中除去间隔壳材料，留下核心蚀刻掩模。 然后将核心掩蔽的目标层进行等离子体蚀刻，以在每个核心的正下方形成目标材料柱。 核心和核心下面的任何间隔物材料被去除。 所得到的靶材料的圆形岛可以在下层的湿各向同性蚀刻期间用作蚀刻掩模。 使用使用珠芯作为主掩模的等离子体蚀刻和使用通过等离子体蚀刻形成的岛作为二次掩模的湿蚀刻的这种组合可以用于在下面的导电或半导体层中形成微点阴极发射极尖端。

公开(公告)号：US06705915B2

公开(公告)日：2004-03-16

申请号：US10168188

申请日：2002-06-18

Applicant: Jean-Luc Ricaud ,  Jean-Claude Pruvost ,  Francois Nizery ,  Jean Remy Adamski

Inventor： Jean-Luc Ricaud ,  Jean-Claude Pruvost ,  Francois Nizery ,  Jean Remy Adamski

IPC: H01J904

CPC classification number: H01J9/047 ,  Y10T29/49925

Abstract: A process for assembling a cathode for electron gun comprising a body of emissive material, a cup into which the body of emissive material is inserted, a substantially cylindrical metal skirt, the said process comprising the following successive steps: insertion of the cup into one of the open ends of the metal skirt, welding of the cup to the skirt, crimping of the body/cup/skirt assembly by lateral squeezing at the level of the weld zone in such a way as to cause an indent-like deformation of the lateral face of the body.

Abstract translation: 一种组装用于电子枪的阴极的方法，包括发射体的主体，发射材料的主体插入其中的杯子，基本上圆柱形的金属裙部，所述方法包括以下连续步骤：将杯子插入 金属裙部的开口端，将杯子焊接到裙部，通过在焊接区域的水平面侧向挤压而使主体/杯/裙部组件卷曲，从而导致横向的凹陷状变形 身体的脸。

公开(公告)号：US06705913B2

公开(公告)日：2004-03-16

申请号：US09769601

申请日：2001-01-25

Applicant: Satoru Nakagawa

Inventor： Satoru Nakagawa

IPC: H01J904

CPC classification number: H01J9/047 ,  H01J1/28 ,  H01J9/042

Abstract: An impregnated cathode whose initial electron emitting performance, lifetime property, and insulating property for an electron gun are excellent and that is suitable for mass production, and a method for manufacturing the same. In the impregnated cathode, the porosity of the sintered body of porous metal is continuously increased as the distance in the depth direction from an electron emitting face is increased. A pellet of sintered body of metal raw material has pores in it. The pores are filled with electron emitting material. The porosity is continuously increased as the distance in the depth direction from an electron emitting face is increased. Thus, since the discontinuity inside the pellet is not formed, a reaction generating free Ba continuously and smoothly proceeds on the entire pellet. In addition, since raw material powder having more than one kind of particle size is not necessary to be used, the manufacturing process can be simplified. Moreover, various functions such as lifetime property, etc. can be improved by making the porosity and porosity distribution in a certain range.

Abstract translation: 其电子枪的初始电子发射性能，寿命特性和绝缘性能优异且适合于批量生产的浸渍阴极及其制造方法。 在浸渍的阴极中，随着电子发射面的深度方向的距离增加，多孔金属的烧结体的孔隙率不断增加。 金属原料烧结体的颗粒中有孔。 孔被电子发射材料填充。 随着距离电子发射面的深度方向的距离增加，孔隙率不断增加。 因此，由于不形成丸粒内部的不连续性，因此在整个丸粒上连续且平稳地进行产生游离Ba的反应。 此外，由于不需要使用具有多种粒径的原料粉末，因此可以简化制造工艺。 此外，通过使孔隙率和孔隙率分布在一定范围内，可以改善诸如寿命性质等各种功能。

公开(公告)号：US06648711B1

公开(公告)日：2003-11-18

申请号：US09592257

申请日：2000-06-12

Applicant: Jin Jang ,  Suk-jae Chung ,  Sung-hoon Lim ,  Jae-eun Yoo

Inventor： Jin Jang ,  Suk-jae Chung ,  Sung-hoon Lim ,  Jae-eun Yoo

IPC: H01J904

CPC classification number: B82Y10/00 ,  H01J1/304 ,  H01J9/025 ,  H01J31/127 ,  Y10S977/721 ,  Y10S977/723 ,  Y10S977/742 ,  Y10S977/843 ,  Y10S977/844 ,  Y10S977/888

Abstract: A field emitter having a high current density even at a low voltage using a carbon nanotube film, a method of manufacturing the same, and a field emission display device having the field emitter, are provided, The field emitter includes an insulating substrate. a thin film transistor formed on the insulating substrate, the thin film transistor having a semiconductor layer, a source electrode, a drain electrode and a gate electrode, and an electron emitting unit formed of a carbon nanotube film on the drain electrode of the thin film transistor The thin film transistor can be a coplanar-type transistor, a stagger-type transistor, or an inverse stagger-type transistor. The surface of a portion of the drain electrode, which contacts the carbon nanotube film, contains catalytic metal which is transition metal such as nickel or cobalt. Alternatively, the drain electrode itself can be formed of catalytic metal for carbon nanotube growth.

Abstract translation: 提供了即使在使用碳纳米管膜的低电压下也具有高电流密度的场致发射体，其制造方法以及具有该场致发射体的场致发射显示装置。场发射器包括绝缘基板。 形成在所述绝缘基板上的薄膜晶体管，所述薄膜晶体管具有半导体层，源极，漏极和栅电极，以及由所述薄膜的漏电极上的碳纳米管膜形成的电子发射单元 晶体管薄膜晶体管可以是共面型晶体管，交错型晶体管或反交错型晶体管。 与碳纳米管膜接触的漏电极的一部分的表面含有催化金属，其为镍或钴等过渡金属。 或者，漏电极本身可以由用于碳纳米管生长的催化金属形成。

公开(公告)号：US06464888B1

公开(公告)日：2002-10-15

申请号：US09482187

申请日：2000-01-12

Applicant: Joel M. Frendt

Inventor： Joel M. Frendt

IPC: H01J904

CPC classification number: B82Y30/00 ,  B82Y10/00 ,  G02F1/13394 ,  H01J9/025 ,  Y10S438/945 ,  Y10T428/24372 ,  Y10T428/25 ,  Y10T428/252 ,  Y10T428/256

Abstract: A process for forming an etch mask having a discontinuous regular pattern utilizes beads, each of which has a substantially unetchable core covered by a removable spacer coating.

Abstract translation: 用于形成具有不连续规则图案的蚀刻掩模的方法使用珠，其中每个具有由可移除的间隔物涂层覆盖的基本上不可取的芯。

公开(公告)号：US06306003B1

公开(公告)日：2001-10-23

申请号：US09501040

申请日：2000-02-09

Applicant: Satoru Nakagawa

Inventor： Satoru Nakagawa

IPC: H01J904

CPC classification number: H01J9/047 ,  H01J1/28 ,  H01J9/042

Abstract: An impregnated cathode whose initial electron emitting performance, lifetime property, and insulating property for an electron gun are excellent and that is suitable for mass production, and a method for manufacturing the same. In the impregnated cathode, the porosity of the sintered body of porous metal is continuously increased as the distance in the depth direction from an electron emitting face is increased. A pellet of sintered body of metal raw material has pores in it. The pores are filled with electron emitting material. The porosity is continuously increased as the distance in the depth direction from an electron emitting face is increased. Thus, since the discontinuity inside the pellet is not formed, a reaction generating free Ba continuously and smoothly proceeds on the entire pellet. In addition, since raw material powder having more than one kind of particle size is not necessary to be used, the manufacturing process can be simplified. Moreover, various functions such as lifetime property, etc. can be improved by making the porosity and porosity distribution in a certain range.

Abstract translation: 其电子枪的初始电子发射性能，寿命特性和绝缘性能优异且适合于批量生产的浸渍阴极及其制造方法。 在浸渍的阴极中，随着电子发射面的深度方向的距离增加，多孔金属的烧结体的孔隙率不断增加。 金属原料烧结体的颗粒中有孔。 孔被电子发射材料填充。 随着距离电子发射面的深度方向的距离增加，孔隙率不断增加。 因此，由于不形成丸粒内部的不连续性，因此在整个丸粒上连续且平稳地进行产生游离Ba的反应。 此外，由于不需要使用具有多种粒径的原料粉末，因此可以简化制造工艺。 此外，通过使孔隙率和孔隙率分布在一定范围内，可以改善诸如寿命性质等各种功能。