公开(公告)号：US20090168076A1

公开(公告)日：2009-07-02

申请号：US12334034

申请日：2008-12-12

Applicant: Zongtao GE

Inventor： Zongtao GE

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B11/255 ,  G01M11/025 ,  G01M11/0271

Abstract: The light wave interferometer apparatus is provided and includes: a luminous flux, which is sent from the light source and divided into two portions by the luminous flux separation and composition unit, are combined with each other again under the condition that the divided luminous fluxes hold wavefront information corresponding to the surface shapes of the aspherical lens to be inspected and the reference aspherical lens by the respectively corresponding basis spherical lenses. Therefore, a wavefront difference of the aspherical lens to be inspected with respect to the reference aspherical lens is made to be interference fringe information and formed on an image pickup plane of the interferometer CCD camera. The basis spherical lenses have the basis spherical surfaces, the curvatures of which are equal to each other.

Abstract translation: 提供了光波干涉仪装置，其包括：从光源发送并由光束分离和合成单元分成两部分的光束在分开的光束保持的条件下再次组合 对应于待检查的非球面透镜的表面形状的波前信息和通过分别对应的基准球面透镜的参考非球面透镜。 因此，将相对于参考非球面透镜检查的非球面透镜的波前差设为干涉条纹信息并形成在干涉仪CCD照相机的摄像平面上。 基本球面透镜具有基础球面，其曲率彼此相等。