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公开(公告)号：US11626282B2
公开(公告)日：2023-04-11
申请号：US16678115
申请日：2019-11-08
Applicant: Samsung Electronics Co., Ltd.
Inventor： Eunkyu Lee , Kyung-Eun Byun , Hyunjae Song , Hyeonjin Shin , Changhyun Kim , Keunwook Shin , Changseok Lee , Alum Jung
IPC: H01L21/02 , H01L29/16 , H01L29/165
Abstract: Provided are a graphene structure and a method of forming the graphene structure. The graphene structure includes a substrate and graphene on a surface of the substrate. Here, a bonding region in which a material of the substrate and carbon of the graphene are covalently bonded is formed between the surface of the substrate and the graphene.
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公开(公告)号：US11069619B2
公开(公告)日：2021-07-20
申请号：US16238208
申请日：2019-01-02
Applicant: Samsung Electronics Co., Ltd.
Inventor： Seunggeol Nam , Hyeonjin Shin , Keunwook Shin , Changhyun Kim , Kyung-Eun Byun , Hyunjae Song , Eunkyu Lee , Changseok Lee , Alum Jung , Yeonchoo Cho
IPC: H01L23/532 , H01L23/528 , H01L23/522
Abstract: An interconnect structure and an electronic device including the interconnect structure are disclosed. The interconnect structure may include a metal interconnect having a bottom surface and two opposite side surfaces surrounded by a dielectric layer, a graphene layer on the metal interconnect, and a metal bonding layer providing interface adhesion between the metal interconnect and the graphene layer. The metal bonding layer includes a metal material.
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公开(公告)号：US20190033704A1
公开(公告)日：2019-01-31
申请号：US15946087
申请日：2018-04-05
Applicant: Samsung Electronics Co., Ltd.
Inventor： Seongjun JEONG , Hyeonjin Shin , Sangwon Kim , Seongjun Park , Minsu Seol , Dongwook Lee , Yunseong Lee , Alum Jung
CPC classification number: G03F1/62 , G03F1/22 , G03F7/70008 , G03F7/70983
Abstract: A pellicle composition for a photomask, a pellicle for a photomask, the pellicle for a photomask being formed from the pellicle composition, a method of forming the pellicle, a reticle including the pellicle, and an exposure apparatus for lithography including the reticle are provided. The pellicle composition includes: at least one selected from graphene quantum dots and a graphene quantum dot precursor, the graphene quantum dots having a size of about 50 nm or less; and a solvent.
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公开(公告)号：US11572278B2
公开(公告)日：2023-02-07
申请号：US16675350
申请日：2019-11-06
Applicant: Samsung Electronics Co., Ltd.
Inventor： Hyeonjin Shin , Keunwook Shin , Changhyun Kim , Seunggeol Nam , Kyung-Eun Byun , Hyunjae Song , Eunkyu Lee , Changseok Lee , Alum Jung , Yeonchoo Cho
IPC: B32B9/00 , C01B32/186 , B82Y30/00
Abstract: A method of growing graphene includes forming a carbon monolayer on a substrate by injecting a first reaction gas into a reaction chamber, wherein the first reaction gas includes a first source including a component that is a carbon source and belongs to an electron withdrawing group, and injecting a second reaction gas including a second source into the reaction chamber, wherein the second source includes a functional group that forms a volatile structure by reacting with a component that belongs to an electron withdrawing group. Graphene may be directly grown on a surface of the substrate by repeatedly injecting the first reaction gas and the second reaction gas.
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公开(公告)号：US20200350164A1
公开(公告)日：2020-11-05
申请号：US16678115
申请日：2019-11-08
Applicant: Samsung Electronics Co., Ltd.
Inventor： Eunkyu Lee , Kyung-Eun Byun , Hyunjae Song , Hyeonjin Shin , Changhyun Kim , Keunwook Shin , Changseok Lee , Alum Jung
IPC: H01L21/02 , H01L29/16 , H01L29/165
Abstract: Provided are a graphene structure and a method of forming the graphene structure. The graphene structure includes a substrate and graphene on a surface of the substrate. Here, a bonding region in which a material of the substrate and carbon of the graphene are covalently bonded is formed between the surface of the substrate and the graphene.
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公开(公告)号：US10777412B2
公开(公告)日：2020-09-15
申请号：US15874226
申请日：2018-01-18
Applicant: Samsung Electronics Co., Ltd.
Inventor： Dongwook Lee , Sangwon Kim , Minsu Seol , Seongjun Park , Hyeonjin Shin , Yunseong Lee , Seongjun Jeong , Alum Jung
IPC: H01L21/00 , H01B1/00 , H01L21/033 , G03F7/11 , G03F7/09 , H01B1/04 , C01B32/194 , H01L21/311 , B82Y30/00 , B82Y40/00
Abstract: Provided are a hardmask composition, a method of preparing the same, and a method of forming a patterned layer using the hardmask composition. The hardmask composition may include graphene quantum dots, a metal compound, and a solvent. The metal compound may be chemically bonded (e.g., covalently bonded) to the graphene quantum dots. The metal compound may include a metal oxide. The metal oxide may include at least one of zirconium (Zr) oxide, titanium (Ti) oxide, tungsten (W) oxide, or aluminum (Al) oxide. The graphene quantum dots may be bonded to the metal compound by an M—O—C bond or an M—C bond, where M is a metal element, O is oxygen, and C is carbon.
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公开(公告)号：US10587207B2
公开(公告)日：2020-03-10
申请号：US15412557
申请日：2017-01-23
Applicant: Samsung Electronics Co., Ltd.
Inventor： Alum Jung , Hyeonjin Shin , Jae-Young Kim , Kyung-Eun Byun
IPC: H02N1/04
Abstract: Disclosed are triboelectric generators using surface plasmon resonance. A triboelectric generator includes first and second electrodes spaced apart from each other, first and second electrification layers provided on the first and second electrodes, respectively, and a light source provided to irradiate light onto the second electrification layer. Herein, the second electrification layer includes a metallic material configured to generate surface plasmon resonance due to light of a desired wavelength, and the light source irradiates the light of the desired wavelength configured to generate the surface plasmon resonance, onto the second electrification layer.
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公开(公告)号：US20200035602A1
公开(公告)日：2020-01-30
申请号：US16238208
申请日：2019-01-02
Applicant: Samsung Electronics Co., Ltd.
Inventor： Seunggeol Nam , Hyeonjin Shin , Keunwook Shin , Changhyun Kim , Kyung-Eun Byun , Hyunjae Song , Eunkyu Lee , Changseok Lee , Alum Jung , Yeonchoo Cho
IPC: H01L23/532 , H01L23/528 , H01L23/522
Abstract: An interconnect structure and an electronic device including the interconnect structure are disclosed. The interconnect structure may include a metal interconnect having a bottom surface and two opposite side surfaces surrounded by a dielectric layer, a graphene layer on the metal interconnect, and a metal bonding layer providing interface adhesion between the metal interconnect and the graphene layer. The metal bonding layer includes a metal material.
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公开(公告)号：US10372277B2
公开(公告)日：2019-08-06
申请号：US15403491
申请日：2017-01-11
Applicant: Samsung Electronics Co., Ltd.
Inventor： Kyung-Eun Byun , Jae-Young Kim , Hyeonjin Shin , Alum Jung
Abstract: Example embodiments relate to a triboelectric device including first and second electrodes that are spaced apart from each other, a charging layer provided on the first electrode, a display layer, which is provided between the first and second electrodes, configured to implement an image according to a change in an electric field between the first and second electrodes, and a charging member charged with an opposite polarity to the polarity of the charging layer by contacting the charging layer, wherein the triboelectric device is configured to implement the image according to the change in the electric field between the first and second electrodes in a contact area of the charging member and the charging layer.
