公开(公告)号：US10281333B2

公开(公告)日：2019-05-07

申请号：US15497353

申请日：2017-04-26

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Kouhei Takahashi ,  Takashi Kawasaki ,  Yasuyuki Naito ,  Morio Tomiyama

IPC: G01J5/02 ,  G01J5/14 ,  G01J5/22 ,  G01J5/20 ,  G01J5/12

Abstract: An infrared sensor is formed in such a manner that an infrared receiver and a base substrate are spaced with a beam made of a thin-film phononic crystal in which through holes are arranged periodically. The beam made of a phononic crystal is formed in such a manner that a period P of through holes increases at arbitrary intervals in a direction from the infrared receiver toward the base substrate.