公开(公告)号：US11874167B2

公开(公告)日：2024-01-16

申请号：US17723017

申请日：2022-04-18

Applicant: MKS TECHNOLOGY

Inventor： Mark Watson ,  Shane Buller ,  Keith Carron

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/44 ,  G01N21/65

CPC classification number: G01J3/0208 ,  G01J3/06 ,  G01J3/44 ,  G01N21/65 ,  G01J2003/062 ,  G01J2003/064

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

公开(公告)号：US20180283941A1

公开(公告)日：2018-10-04

申请号：US15727415

申请日：2017-10-06

Applicant: MKS TECHNOLOGY (D/B/A SNOWY RANGE

Inventor： Mark Watson ,  Shane Buller ,  Keith Carron

IPC: G01J3/02 ,  G01J3/44 ,  G01N21/65 ,  G01J3/06

CPC classification number: G01J3/0208 ,  G01J3/06 ,  G01J3/44 ,  G01J2003/062 ,  G01J2003/064 ,  G01N21/65

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

公开(公告)号：US09791313B2

公开(公告)日：2017-10-17

申请号：US13907812

申请日：2013-05-31

Applicant: MKS TECHNOLOGY

Inventor： Mark Watson ,  Shane Buller ,  Keith Carron

IPC: G01J3/02 ,  G01J3/06 ,  G01J3/44 ,  G01N21/65

CPC classification number: G01J3/0208 ,  G01J3/06 ,  G01J3/44 ,  G01J2003/062 ,  G01J2003/064 ,  G01N21/65

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

公开(公告)号：US20150099292A1

公开(公告)日：2015-04-09

申请号：US14518855

申请日：2014-10-20

Applicant: MKS TECHNOLOGY (D/B/A SNOWY RANGE INSTRUMENTS)

Inventor： Keith Carron ,  Mark Watson ,  Shane Buller

IPC: G01J3/02 ,  G01N21/65 ,  G01J3/44

CPC classification number: G01J3/0237 ,  G01J3/0208 ,  G01J3/44 ,  G01J3/4412 ,  G01N21/65

Abstract: A spectroscopic system is provided. In one embodiment, the spectroscopic system comprises a light source adapted to provide a beam of illumination; an optical system adapted to provide the beam of illumination to a sample and receive a spectroscopy signal from the sample and direct the spectroscopy signal to at least one single channel detector, wherein the optical system comprises an adjustable dispersing element for directing one or more spectral features of the spectroscopy signal to the at least one single channel detector; a calibration detector adapted to determine a set point of the adjustable dispersing element; and a source synchronization component adapted to synchronize an operation of the light source and the at least one single channel detector. A method of calibrating a dispersing element of a spectrometer is also provided.

Abstract translation: 提供光谱系统。 在一个实施例中，分光系统包括适于提供照明光束的光源; 光学系统，其适于向样本提供照射束并从样本接收光谱信号，并将光谱信号引导到至少一个单通道检测器，其中该光学系统包括用于引导一个或多个光谱特征 的至少一个单通道检测器; 校准检测器，适于确定可调分散元件的设定点; 以及源同步部件，其适于使所述光源和所述至少一个单通道检测器的操作同步。 还提供了校准分光器的分散元件的方法。