公开(公告)号：US11698336B2

公开(公告)日：2023-07-11

申请号：US17036825

申请日：2020-09-29

Applicant: JEOL Ltd. ,  National Institute of Advanced Industrial Science and Technology

Inventor： Kenichi Tsutsumi ,  Akihiro Tanaka ,  Kazushiro Yokouchi ,  Tatsuya Uchida ,  Noboru Taguchi ,  Shingo Tanaka

IPC: G01N21/17 ,  G01N21/25

CPC classification number: G01N21/25 ,  G01N2021/1765 ,  G01N2201/10 ,  G01N2201/127

Abstract: An analysis method includes: obtaining n×m pieces of map data by repeating, m times, a map measurement in which n pieces of map data are obtained by scanning a specimen with a primary probe to detect electrons emitted from the specimen with an electron spectrometer, while measurement energy ranges of an analyzer are varied; and generating a spectral map in which a position on the specimen is associated with a spectrum based on the n×m pieces of map data, the measurement energy ranges of m times of the map measurement not overlapping each other.