公开(公告)号：US09888555B2

公开(公告)日：2018-02-06

申请号：US15422489

申请日：2017-02-02

Applicant: GIGAPHOTON INC.

Inventor： Masahiko Ando ,  Yoshifumi Ueno ,  Toru Suzuki

IPC: G01J3/10 ,  H05G2/00

CPC classification number: H05G2/008 ,  G03F7/70033 ,  G03F7/70808 ,  G03F7/70991

Abstract: The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.