公开(公告)号：US5303731A

公开(公告)日：1994-04-19

申请号：US906922

申请日：1992-06-30

申请人： Randall J. Vavra ,  Michael J. Doyle ,  Kim N. Vu

发明人： Randall J. Vavra ,  Michael J. Doyle ,  Kim N. Vu

IPC分类号： G01F1/50 ,  G01F1/88 ,  G01F15/02 ,  G05D7/06

CPC分类号： G05D7/0635 ,  G01F1/50 ,  G01F1/88 ,  G01F15/022 ,  Y10T137/7737 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A liquid flow controller for metering a flow of liquid has an inlet to receive the liquid. The inlet feeds the liquid to a high resistance liquid flow path across which a pressure drop arises. A pressure sensor measures the liquid flow induced pressure drop and generates pressure drop signal which is fed to an electronic circuit. A temperature sensor is connected to the high resistance liquid flow path and generates a temperature signal which is also fed to the electronic circuit. The circuit energizes a viscosity-normalized liquid flow signal, which is compared to a set point signal to generate an error signal. A valve connected downstream of the high resistance liquid flow path to control the flow of liquid is driven by the error signal and thereby controls the flow of liquid.

摘要翻译： 用于计量液体流的液体流量控制器具有用于接收液体的入口。 入口将液体供给到高阻力液体流动通道，压力下降产生。 压力传感器测量液体流动感应压降并产生送入电子电路的压降信号。 温度传感器连接到高电阻液体流路并产生也馈送到电子电路的温度信号。 电路对粘度归一化的液体流量信号进行激励，该信号与设定点信号进行比较以产生误差信号。 连接在高电阻液体流路下游以控制液体流动的阀门由误差信号驱动，从而控制液体流动。

公开(公告)号：US06044701A

公开(公告)日：2000-04-04

申请号：US815323

申请日：1997-03-10

申请人： Michael J. Doyle ,  Dan B. LeMay ,  Kim N. Vu

发明人： Michael J. Doyle ,  Dan B. LeMay ,  Kim N. Vu

IPC分类号： G01F1/684 ,  G05D7/06 ,  G01F1/68

CPC分类号： G01F1/6845 ,  G05D7/0635

摘要： A thermal mass flow controller having a thermal mass flow meter with an orthogonal thermal mass flow sensor includes a base defining a primary fluid flow path therein for carrying a flow of fluid to be metered. A pressure dropping bypass is positioned in the primary fluid flow path. A flow measuring portion of a thermal mass flow sensor is oriented substantially transversely or orthogonally with respect to and is in communication with the primary fluid flow path. The flow measuring portion includes a portion of an electrical bridge for determining a temperature of the sensor and produces a mass flow rate signal in response thereto. A valve is connected to an outlet of the primary flow path to control the flow of fluid in response to the mass flow rate signal.

摘要翻译： 具有具有正交热质量流量传感器的热质量流量计的热质量流量控制器包括限定其中的主要流体流动路径的基座，用于承载要计量的流体流。 压降旁路定位在主流体流路中。 热质量流量传感器的流量测量部分相对于主流体流动路径基本上横向或正交地定向并且与主流体流路连通。 流量测量部分包括电桥的一部分，用于确定传感器的温度并响应于此产生质量流量信号。 阀连接到主流路的出口，以响应于质量流量信号来控制流体的流动。

公开(公告)号：US5730181A

公开(公告)日：1998-03-24

申请号：US758971

申请日：1996-12-02

申请人： Michael J. Doyle ,  Nelson Urdaneta ,  Kim N. Vu

发明人： Michael J. Doyle ,  Nelson Urdaneta ,  Kim N. Vu

IPC分类号： B01D53/04 ,  B01D53/26 ,  G05D7/06

CPC分类号： B01D53/0415 ,  B01D53/0454 ,  G05D7/0635 ,  B01D2257/80 ,  B01D2258/0216 ,  B01D2259/40009 ,  B01D53/0446 ,  B01D53/261 ,  Y10T137/7761

摘要： A mass flow controller and purifier has a canister arranged at right angles to a flow path through the mass flow controller. The canister holds a contaminant scavenging material which a gas stream contacts as it flows to remove a contaminant such as water. A purified process gas stream is fed through a bypass of a mass flow meter. A portion of the gas is supplied to a mass flow sensor which generates a signal indicative of a rate of mass flow. The mass flow signal is amplified and the amplified mass flow signal is linearized in a linearizer. The linearized mass flow signal is fed to a comparator which compares the linearized mass flow signal with an error signal and provides an output signal indicative of a mass rate of flow through the mass flow meter. A valve is connected to the mass flow meter and is controlled by the mass flow meter signal to meter the gas.

摘要翻译： 质量流量控制器和净化器具有与通过质量流量控制器的流动路径成直角布置的罐。 罐容纳污染物清除材料，气流在其流动时接触以除去诸如水的污染物。 净化的工艺气流通过质量流量计的旁路进料。 一部分气体被供应到质量流量传感器，其产生指示质量流量的信号。 质量流量信号被放大，放大的质量流量信号在线性化器中被线性化。 线性化质量流量信号被馈送到比较器，比较器将线性化质量流量信号与误差信号进行比较，并提供指示通过质量流量计的质量流量的输出信号。 阀门连接到质量流量计，并由质量流量计信号控制以测量气体。