EVAPORATION COATING APPARATUS
    12.
    发明申请
    EVAPORATION COATING APPARATUS 有权
    蒸发涂装装置

    公开(公告)号:US20160251751A1

    公开(公告)日:2016-09-01

    申请号:US14768587

    申请日:2014-12-29

    CPC classification number: C23C14/243 C23C14/26

    Abstract: An evaporation coating apparatus comprising a heating unit (3) and a cylindrical member (1) disposed within the heating unit (3), wherein the cylindrical member (1) comprises a hollow sleeve (13) and a barrel (12) disposed at an inner side of the hollow sleeve (13) in a fitting manner; wherein a top end area of the hollow sleeve (13) is provided with a first evaporation hole (131), and an external surface of the hollow sleeve (13) is provided with an internal heater strip (4) connected to a control unit ; wherein an external surface of the barrel (12) is provided with a groove (1′) extending along an axial central line of the barrel (12), the groove (1′) is provided with a plurality of compartments (11) arranged at interval space, and each of the compartments (11) is provided with a crucible (2); wherein the crucible (2) comprises a main body (21) which is disposed within the compartment (11) and sealed all around with one side opened, and a cover (22) which is connected to the main body (21) in a fitting manner and provided with a second evaporation hole (221) corresponding to the first evaporation hole (131); and wherein the heating unit (3) has a hollow columnar structure, and an external surface of the heating unit (3) is provided with an external heater strip (5) and a nozzle (31) which is corresponding to the first evaporation hole (131). The evaporation coating apparatus is mainly configured to manufacture large-sized displays and can improve the uniformity of film-forming with organic material on the surface of the substrate.

    Abstract translation: 一种蒸发涂覆装置,包括加热单元(3)和设置在加热单元(3)内的圆柱形构件(1),其中圆柱形构件(1)包括中空套筒(13)和设置在加热单元 中空套筒(13)的内侧配合; 其中,所述中空套筒(13)的顶端区域设置有第一蒸发孔(131),并且所述中空套管(13)的外表面设置有连接到控制单元的内部加热条(4) 其特征在于,所述筒体(12)的外表面设置有沿所述筒体(12)的轴向中心线延伸的槽(1'),所述槽(1')设置有多个隔室(11) 间隔空间,并且每个隔室(11)设置有坩埚(2); 其特征在于,所述坩埚(2)包括主体(21),所述主体(21)设置在所述隔室(11)内并且一侧开口的全封闭,以及盖(22),其与所述主体 并且设置有与第一蒸发孔对应的第二蒸发孔(221)。 并且其中所述加热单元(3)具有中空柱状结构,并且所述加热单元(3)的外表面设置有对应于所述第一蒸发孔的外部加热条(5)和喷嘴(31) 131)。 蒸发涂布装置主要构造成制造大尺寸显示器,并且可以在基板的表面上提高有机材料的成膜均匀性。

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