公开(公告)号：US11072502B2

公开(公告)日：2021-07-27

申请号：US16358478

申请日：2019-03-19

Applicant: Applied Materials, Inc.

Inventor： Asaf Schlezinger ,  Markus J. Stopper

IPC: B65G47/91 ,  H01L21/683 ,  H01L21/67 ,  B25J15/06

Abstract: An apparatus and method for sorting a plurality of substrates is disclosed. The apparatus includes a sorting unit capable of supporting a plurality of bins, a rotatable support disposed within the sorting unit, the rotatable support rotatable about a rotational axis, a plurality of grippers coupled to the rotatable support on a common radius relative to the rotational axis, the grippers positioned to travel along a path above the bins as the rotatable support rotates, and an air nozzle configured to reorient a sorted substrate relative to a stacked substrate in a bin of the plurality of bins when released by one of the grippers into the bin.

公开(公告)号：US10406562B2

公开(公告)日：2019-09-10

申请号：US15708943

申请日：2017-09-19

Applicant: Applied Materials, Inc.

Inventor： Markus J. Stopper ,  Asaf Schlezinger

IPC: H01L21/677 ,  B07C5/36

Abstract: In one example, a sorting unit includes a sorting system and a plurality of bins into which substrates are sorted. The sorting unit includes a bin handler having a first end effector for receiving one bin of the plurality of bins, and second end effector for disposing an empty bin in the previous location of the received bin. In one example, a method of operating a sorting unit is also provided.

公开(公告)号：US10403533B2

公开(公告)日：2019-09-03

申请号：US14703851

申请日：2015-05-04

Applicant: Applied Materials, Inc.

Inventor： Markus J. Stopper ,  Asaf Schlezinger

IPC: H01L21/677

Abstract: A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection station is disclosed herein. The loading module includes two arms, a plurality of substrate grippers, two rotatable support members, a conveyor, and at least one actuator. Each arm has a first end and a second end, wherein the second end is opposite the first end. Each substrate gripper is disposed at a respective end of each arm. Each rotatable support member is coupled to a respective one of the arms. The conveyor is disposed between the rotatable support members. The at least one actuator is configured to rotate the arms about the rotatable support members to selectively position the grippers over the conveyor in a location that allows a substrate held by the gripper to be released onto the conveyor.