公开(公告)号：US20220093361A1

公开(公告)日：2022-03-24

申请号：US17028587

申请日：2020-09-22

Applicant: Applied Materials, Inc.

Inventor： Reyn Tetsuro WAKABAYASHI ,  Carlaton WONG ,  Timothy Joseph FRANKLIN

IPC: H01J37/32

Abstract: Embodiments of showerheads are provided herein. In some embodiments, a showerhead assembly includes a chill plate having a plurality of recursive gas paths and one or more cooling channels disposed therein, wherein each of the plurality of recursive gas paths is fluidly coupled to a single gas inlet extending to a first side of the chill plate and a plurality of gas outlets extending to a second side of the chill plate; and a heater plate coupled to the chill plate, wherein the heater plate includes a plurality of first gas distribution holes extending from a top surface thereof to a plurality of plenums disposed within the heater plate, the plurality of first gas distribution holes corresponding with the plurality of gas outlets of the chill plate, and a plurality of second gas distribution holes extending from the plurality of plenums to a lower surface of the heater plate.