公开(公告)号：US20140061473A1

公开(公告)日：2014-03-06

申请号：US13945542

申请日：2013-07-18

申请人： Mohammad J. Khan ,  Sumanth Kaushik ,  Jerry C. Chen

发明人： Mohammad J. Khan ,  Sumanth Kaushik ,  Jerry C. Chen

IPC分类号： G01J3/42

CPC分类号： G01J3/42 ,  G01N21/3581 ,  G01N2021/1793

摘要： Disclosed herein are a system and corresponding method for sensing terahertz radiation. The system collects terahertz radiation scattered from a target and upconverts the collected radiation to optical frequencies. A frequency-domain spectrometer senses spectral components of the upconverted signal in parallel to produce a spectroscopic measurement of the entire band of interest in a single shot. Because the sensing system can do single-shot measurements, it can sense moving targets, unlike sensing systems that use serial detection, which can only be used to sense stationary objects. As a result, the sensing systems and methods disclosed herein may be used for real-time imaging, including detection of concealed weapons, medical imaging, and hyperspectral imaging.

摘要翻译： 这里公开了用于感测太赫兹辐射的系统和相应的方法。 该系统收集从目标散射的太赫兹辐射，并将收集的辐射上变频到光频率。 频域光谱仪平行地感测上转换信号的光谱分量，以在单次拍摄中产生整个感兴趣的频带的光谱测量。 因为感测系统可以进行单次测量，所以它可以感测移动目标，不同于使用串行检测的传感系统，只能用于感测静止物体。 结果，本文公开的感测系统和方法可用于实时成像，包括隐藏武器的检测，医学成像和高光谱成像。

公开(公告)号：US20100034499A1

公开(公告)日：2010-02-11

申请号：US12579108

申请日：2009-10-14

申请人： Jerry C. Chen

发明人： Jerry C. Chen

IPC分类号： G02B6/26

CPC分类号： G02B6/352 ,  G02B6/3546 ,  G02B6/356

摘要： A method for cross connecting optical signals includes using a common beam steerer to direct a set of optical signals from a set of input ports to a set of output ports. The method further includes adjusting a curvature of the common beam steerer so that paths of the optical signals have substantially the same effective path length.

摘要翻译： 用于交叉连接光信号的方法包括使用公共波束控制器将一组光信号从一组输入端口引导到一组输出端口。 该方法还包括调整公共光束转向器的曲率，使得光信号的路径具有基本上相同的有效路径长度。

公开(公告)号：US07564567B2

公开(公告)日：2009-07-21

申请号：US11626966

申请日：2007-01-25

申请人： Jerry C. Chen ,  Sumanth Kaushik

发明人： Jerry C. Chen ,  Sumanth Kaushik

IPC分类号： G01B11/02

CPC分类号： G01B15/00 ,  G01H9/00

摘要： Described are a sensor and a method for measuring a vibration of a surface obscured from view. The sensor includes a narrowband source of a terahertz beam, a beamsplitter, a beam combiner and a terahertz detector. The beamsplitter splits the terahertz beam into a sample beam for irradiating the surface and a reference beam. The beam combiner combines the sample beam scattered from the surface and the reference beam. The terahertz detector generates an electrical signal based on a modulation of the power of the combined beams due to the vibrating surface. The electrical signal indicates a characteristic of the surface vibration. Homodyne or heterodyne detection can be utilized. Advantageously, the sensor can see surfaces that are covered, concealed or otherwise obscured behind optically opaque materials, including plastic, cloth, foam, paper and other materials. Thus the sensor has a wide variety of applications where conventional vibrometers are not practical.

摘要翻译： 描述了一种用于测量从视野遮蔽的表面的振动的传感器和方法。 传感器包括太赫兹波束的窄带源，分束器，波束组合器和太赫兹检测器。 分束器将太赫兹光束分成用于照射表面的样品光束和参考光束。 光束组合器将从表面散射的样品光束和参考光束组合。 太赫兹检测器基于由于振动表面的组合光束的功率的调制而产生电信号。 电信号表示表面振动的特征。 可以利用零差或外差检测。 有利地，传感器可以看到在光学不透明材料（包括塑料，布，泡沫，纸和其它材料）之后被覆盖，隐藏或以其他方式遮盖的表面。 因此，传感器具有广泛的应用，其中常规的振动计不实用。

公开(公告)号：US20080292241A1

公开(公告)日：2008-11-27

申请号：US12137023

申请日：2008-06-11

申请人： Jerry C. Chen

发明人： Jerry C. Chen

IPC分类号： G02B6/26

CPC分类号： G02B6/352 ,  G02B6/3546 ,  G02B6/356

摘要： A method for cross connecting optical signals includes using a common beam steerer to direct a set of optical signals from a set of input ports to a set of output ports. The method further includes adjusting a curvature of the common beam steerer so that paths of the optical signals have substantially the same effective path length.

摘要翻译： 用于交叉连接光信号的方法包括使用公共波束控制器将一组光信号从一组输入端口引导到一组输出端口。 该方法还包括调整公共光束转向器的曲率，使得光信号的路径具有基本上相同的有效路径长度。

公开(公告)号：US06367410B1

公开(公告)日：2002-04-09

申请号：US08947174

申请日：1997-10-08

申请人： Patrick Leahey ,  Jerry C. Chen ,  Richard E. Remington ,  Simon Yavelberg ,  Timothy Driscoll ,  Robert E. Ryan ,  Brian Hatcher ,  Rolf Guenther ,  Xueyu Qian

发明人： Patrick Leahey ,  Jerry C. Chen ,  Richard E. Remington ,  Simon Yavelberg ,  Timothy Driscoll ,  Robert E. Ryan ,  Brian Hatcher ,  Rolf Guenther ,  Xueyu Qian

IPC分类号： C23C16507

CPC分类号： H01L21/67103

摘要： A closed-loop, dome thermal control apparatus containing a high-volume fan, a heat exchange chamber, and an enclosure that encloses the fan and the heat exchange chamber. The fan blows air over a dome of a semiconductor wafer processing system and through the heat exchange chamber to uniformly control the temperature of a dome of a plasma chamber to prevent particle contamination of the wafer. The enclosure recirculates the temperature controlled air to the fan to form a closed-loop apparatus.

摘要翻译： 一种包含大容量风扇，热交换室和封闭风扇和热交换室的外壳的闭环圆顶热控制装置。 风扇将空气吹过半导体晶片处理系统的圆顶并通过热交换室，以均匀地控制等离子体室的圆顶的温度，以防止晶片的颗粒污染。 外壳将温度受控的空气再循环到风扇以形成闭环装置。