公开(公告)号：US06251758B1

公开(公告)日：2001-06-26

申请号：US08810221

申请日：1997-02-28

申请人： Chyi Chern ,  Michal Danek ,  Marvin Liao ,  Roderick C. Mosely ,  Karl Littau ,  Ivo Raaijmakers ,  David C. Smith

发明人： Chyi Chern ,  Michal Danek ,  Marvin Liao ,  Roderick C. Mosely ,  Karl Littau ,  Ivo Raaijmakers ,  David C. Smith

IPC分类号： H01L2128

CPC分类号： H01L21/76864 ,  C23C16/34 ,  C23C16/45565 ,  C23C16/4581 ,  C23C16/4586 ,  C23C16/481 ,  C23C16/5096 ,  C23C16/56 ,  H01J37/32174 ,  H01J2237/2001 ,  H01J2237/336 ,  H01L21/28512 ,  H01L21/76843 ,  H01L21/76856 ,  H01L21/76862

摘要： The construction of a film on a wafer, which is placed in a processing chamber, may be carried out through the following steps. A layer of material is deposited on the wafer. Next, the layer of material is annealed. Once the annealing is completed, the material may be oxidized. Alternatively, the material may be exposed to a silicon gas once the annealing is completed. The deposition, annealing, and either oxidation or silicon gas exposure may all be carried out in the same chamber, without need for removing the wafer from the chamber until all three steps are completed. A semiconductor wafer processing chamber for carrying out such an in-situ construction may include a processing chamber, a showerhead, a wafer support and a rf signal means. The showerhead supplies gases into the processing chamber, while the wafer support supports a wafer in the processing chamber. The rf signal means is coupled to the showerhead and the wafer support for providing a first rf signal to the showerhead and a second rf signal to the wafer support.

摘要翻译： 放置在处理室中的晶片上的膜的构造可以通过以下步骤进行。 在晶片上沉积一层材料。 接下来，将材料层退火。 一旦退火完成，材料可能被氧化。 或者，一旦退火完成，材料可能暴露于硅气体。 沉积，退火和氧化或硅气体暴露都可以在相同的室中进行，而不需要从腔室中移除晶片，直到完成所有三个步骤。 用于进行这种原位结构的半导体晶片处理室可以包括处理室，喷头，晶片支架和射频信号装置。 淋浴头将气体供应到处理室中，而晶片支撑件在处理室中支撑晶片。 rf信号装置耦合到喷头和晶片支架，用于向喷头提供第一rf信号，并将第二rf信号耦合到晶片支架。

公开(公告)号：US5678013A

公开(公告)日：1997-10-14

申请号：US377914

申请日：1995-01-25

申请人： David C. Smith ,  G. Allen Cypher

发明人： David C. Smith ,  G. Allen Cypher

IPC分类号： G06F9/44 ,  G06F3/00

CPC分类号： G06F8/30 ,  G06F9/455

摘要： A method and apparatus for constructing subroutines to define the behavior of simulation objects is provided. The apparatus includes a display, a processor, and an input device. The processor generates on the display a GRR set region associated with a simulation object. A user operates the input device to place visual representations of rules and/or subroutines within the GRR set region. When a visual representation of a rule or subroutine is placed within a GRR set, computer step sequences that implement the behavior specified for the rule or subroutine are generated for the simulation object. A user may operate the input device to activate a control on a visual subroutine indicator to cause a subroutine region to appear. When a visual representation of a rule or subroutine is placed within a subroutine region, the behavior specified for the rule or subroutine is incorporated into the subroutine associated with the subroutine region. Different types of subroutines are provided, where the type of a subroutine determines how the rules within the subroutine are processed during a simulation. Pretests may be specified for subroutines so that the behavior represented by the rules within the subroutine will not be exhibited unless the current state of the simulation satisfies the conditions of the pretest. During the performance of a simulation, the processor displays images associated with simulation objects on the display. The processor causes the images to behave according to the generalized computer step sequences that have been generated based upon the rules and/or subroutines represented in the GRR set regions for the respective objects.

摘要翻译： 提供了一种用于构建子程序来定义仿真对象的行为的方法和装置。 该装置包括显示器，处理器和输入装置。 处理器在显示器上生成与仿真对象相关联的GRR集合区域。 用户操作输入设备以将规则和/或子程序的视觉表示放置在GRR设置区域内。 当规则或子程序的视觉表示放置在GRR集合中时，为仿真对象生成实现为规则或子例程指定的行为的计算机步骤序列。 用户可以操作输入设备来激活视觉子程序指示器上的控制以使子程序区域出现。 当一个规则或子程序的视觉表示被放置在子程序区域内时，为规则或子程序指定的行为被并入与子程序区域关联的子程序中。 提供了不同类型的子程序，其中子程序的类型确定在仿真期间如何处理子程序中的规则。 可以为子程序指定预测，以便除非模拟的当前状态满足预测试的条件，否则子程序中由规则表示的行为将不会被显示。 在执行仿真期间，处理器显示与显示器上的仿真对象相关联的图像。 处理器使得图像根据基于在各个对象的GRR集合区域中表示的规则和/或子例程而生成的广义计算机步骤序列来表现。

公开(公告)号：US5566295A

公开(公告)日：1996-10-15

申请号：US187682

申请日：1994-01-25

申请人： Allen Cypher ,  David C. Smith ,  James C. Spohrer

发明人： Allen Cypher ,  David C. Smith ,  James C. Spohrer

IPC分类号： G06F9/44 ,  G06F17/50 ,  G06F3/00

CPC分类号： G06F8/34 ,  G06F17/5009

摘要： An extensible simulation system and graphical programming method enable a simulation user to program the behaviors of objects in a simulation while requiring no knowledge of computer programming concepts or languages. The simulation user defines each object's behaviors by creating Graphical Rewrite Rules through programming by demonstration. The user can selectively abstract a given Graphical Rewrite Rule (GRR) such that it applies to states within the simulation according to hierarchical object types and object property conditions. The extensible simulation system comprises a Central Processing Unit (CPU), an input device, an output device, an external storage device, predetermined amounts of Random Access Memory (RAM) and Read-Only Memory (ROM), and an extensible simulator. The extensible simulator comprises an object source, a simulation viewer, a GRR editor, an action recorder, an abstractor, a drawing editor, an object property editor, an object rule viewer, a subroutine editor, and a simulation execution controller. Each element of the system has an input and an output coupled to a common system bus. Preferably, each element of the extensible simulator is a computer program step sequence stored in RAM. The graphical programming method comprises the steps of: selecting an object for which a GRR is to be defined; establishing a simulation context corresponding to the GRR; defining for the GRR a set of actions to be performed by or upon one or more objects within the simulation context, each action defined through programming by demonstration; automatically recording a computer program step sequence for each action defined; and allowing the GRR to be abstracted.

摘要翻译： 可扩展的仿真系统和图形编程方法使仿真用户可以在不需要计算机编程概念或语言知识的情况下对仿真中的对象行为进行编程。 模拟用户通过演示编程创建图形重写规则来定义每个对象的行为。 用户可以选择性地抽取给定的图形重写规则（GRR），使其适用于根据分层对象类型和对象属性条件的模拟中的状态。 可扩展模拟系统包括中央处理单元（CPU），输入设备，输出设备，外部存储设备，预定量的随机存取存储器（RAM）和只读存储器（ROM）以及可扩展模拟器。 可扩展模拟器包括对象源，模拟查看器，GRR编辑器，动作记录器，抽象器，绘图编辑器，对象属性编辑器，对象规则查看器，子程序编辑器和仿真执行控制器。 系统的每个元件都具有耦合到公共系统总线的输入和输出。 优选地，可扩展模拟器的每个元件是存储在RAM中的计算机程序步骤序列。 图形编程方法包括以下步骤：选择要定义GRR的对象; 建立与GRR相对应的模拟上下文; 为GRR定义要由模拟上下文中的一个或多个对象执行的一组动作，每个动作通过演示进行编程; 为定义的每个动作自动记录计算机程序步骤顺序; 并允许GRR被抽象出来。

公开(公告)号：US5144299A

公开(公告)日：1992-09-01

申请号：US530015

申请日：1990-05-29

申请人： David C. Smith

发明人： David C. Smith

IPC分类号： G08C17/04 ,  G08C19/16

CPC分类号： G08C17/04 ,  G08C19/16

摘要： A telemetry system for use in controlling the operation of sensors configured on a rotating blade of a gas turbine engine includes an oscillator for generating a power carrier signal. A mechanism is included for providing command signals that select a mode of operation of the sensors and a telemetry encoder apparatus is used to generate encoder signals for modulating the power carrier signal in accordance with the selected mode of sensor operation. Also included in the present telemetry system is a programmable switch receiving the power carrier signal for modulating the power carrier signal amplitude in accordance with the encoder signals. A resistor shunts the programmable switching mechanism, and a coil transmits the modulated power carrier signal to a transceiver positioned on the turbine blade providing control signals to the sensor and transmitting sensor information to a receiver coil off of the turbine blade.

摘要翻译： 用于控制构造在燃气涡轮发动机的旋转叶片上的传感器的操作的遥测系统包括用于产生动力载体信号的振荡器。 包括用于提供选择传感器的操作模式的命令信号的机构，并且遥测编码器装置用于根据选择的传感器操作模式产生用于调制功率载波信号的编码器信号。 本遥测系统还包括一个可编程开关，接收载波信号，用于根据编码器信号调制功率载波信号幅度。 电阻分流可编程切换机构，线圈将调制的载波信号传输到位于涡轮机叶片上的收发器，向传感器提供控制信号，并将传感器信息传输到离开涡轮叶片的接收器线圈。

公开(公告)号：US5128112A

公开(公告)日：1992-07-07

申请号：US679487

申请日：1991-04-02

申请人： William G. Van Der Sluys ,  Carol J. Burns ,  David C. Smith

发明人： William G. Van Der Sluys ,  Carol J. Burns ,  David C. Smith

IPC分类号： C01B21/06 ,  C01B25/08 ,  C01F15/00 ,  C01G43/00 ,  C01G43/01 ,  C01G56/00

CPC分类号： C01G43/00 ,  C01B21/063 ,  C01B25/08 ,  C01F15/00 ,  C01G43/01 ,  C01G56/00 ,  C01G56/005 ,  C01P2002/02 ,  C01P2006/60

摘要： A process of preparing an actinide compound of the formula An.sub.x Z.sub.y wherein An is an actinide metal atom selected from the group consisting of thorium, uranium, plutonium, neptunium, and americium, x is selected from the group consisting of one, two or three, Z is a main group element atom selected from the group consisting of nitrogen, phosphorus, oxygen and sulfur and y is selected from the group consisting of one, two, three or four, by admixing an actinide organometallic precursor wherein said actinide is selected from the group consisting of thorium, uranium, plutonium, neptunium, and americium, a suitable solvent and a protic Lewis base selected from the group consisting of ammonia, phosphine, hydrogen sulfide and water, at temperatures and for time sufficient to form an intermediate actinide complex, heating said intermediate actinide complex at temperatures and for time sufficient to form the actinide compound, and a process of depositing a thin film of such an actinide compound, e.g., uranium mononitride, by subliming an actinide organometallic precursor, e.g., a uranium amide precursor, in the presence of an effectgive amount of a protic Lewis base, e.g., ammonia, within a reactor at temperatures and for time sufficient to form a thin film of the actinide compound, are disclosed.

摘要翻译： 制备式AnxZy的锕系化合物的方法，其中An是选自钍，铀，钚，ium和an的锕系金属原子，x选自一个，两个或三个Z 是选自氮，磷，氧和硫的主要元素原子，y选自一个，两个，三个或四个，通过混合锕系元素有机金属前体，其中所述锕系元素选自 由钍，铀，钚，ium和组成，合适的溶剂和选自氨，膦，硫化氢和水的质子路易斯碱在温度和时间足以形成中间体锕系配合物，加热 所述中间体锕系配合物在足以形成锕系化合物的温度和时间下，以及沉积这种锕系化合物的薄膜的方法， 例如，一氧化铀，通过在有效量的质子路易斯碱（例如氨）的存在下，在反应器内在温度和时间足以形成薄膜的情况下升华锕系元素有机金属前体，例如铀酰胺前体 的锕系化合物。

公开(公告)号：USD306467S

公开(公告)日：1990-03-06

申请号：US40581

申请日：1987-04-20

申请人： David C. Smith

设计人： David C. Smith

公开(公告)号：US4792765A

公开(公告)日：1988-12-20

申请号：US909370

申请日：1986-09-19

申请人： David C. Smith ,  Kurt E. Oughstun

发明人： David C. Smith ,  Kurt E. Oughstun

IPC分类号： H01S3/081 ,  H01S3/05 ,  H01S3/083 ,  H01S3/086

CPC分类号： H01S3/0818

摘要： An unstable optical resonator having a gain region that has an elliptic or other non-circular cross section still has the benefits of a total collimated cavity Fresnel number that is azimuthally symmetric by the combination of several cavity regions of azimuthally non-uniform Fresnel number of appropriate size.

摘要翻译： 具有椭圆形或其他非圆形横截面的增益区域的不稳定光学谐振器仍然具有通过方位角不均匀菲律宾数目的若干个空腔区域的组合而具有方位角对称的总准直腔的菲涅尔数的优点 尺寸。

公开(公告)号：US4686629A

公开(公告)日：1987-08-11

申请号：US886936

申请日：1986-07-21

申请人： Richard Noto ,  David C. Smith

发明人： Richard Noto ,  David C. Smith

IPC分类号： G06F17/50 ,  G06F15/20

CPC分类号： G06F17/5072 ,  Y10S257/923

摘要： An improved automatic placement process for placing logic cells in a universal array. Unused basic units are assigned to rows to reduce the congestion of the wiring in high congestion regions of a universal array. These assigned unused basic units are allocated among rows in a pyramidal manner. Those unused basic units allocated to a given row are distributed along that row in a manner to reduce wiring congestion. During a pair exchange portion of the placement process, quality criteria used for deciding whether to exchange two logic cells on different rows include skipped rows in a node, y-span of a node, minimizing the number of logic cells in excess of two in a node on a row, making a longest row shorter and making longer a shortest row or one which is within a tolerance of being a shortest row.

摘要翻译： 用于将逻辑单元放置在通用阵列中的改进的自动放置过程。 未使用的基本单元被分配给行以减少通用阵列的高拥塞区域中的布线的拥塞。 这些分配的未使用的基本单位以金字塔形式分配在行之间。 分配给给定行的那些未使用的基本单元沿着该行分布，以减少布线拥塞。 在放置过程的对交换部分期间，用于决定是否交换不同行上的两个逻辑单元的质量标准包括节点中的跳过行，节点的y跨度，使得在一个节点中超过两个的逻辑单元的数量最小化 节点在一行上，使最长的行更短，并使更长的最短行或在最短行的容限内。

公开(公告)号：US4647772A

公开(公告)日：1987-03-03

申请号：US704283

申请日：1985-02-22

申请人： Ivor A. S. Lewis ,  David C. Smith

发明人： Ivor A. S. Lewis ,  David C. Smith

IPC分类号： G01N30/72 ,  H01J49/04

CPC分类号： H01J49/0431 ,  G01N30/7253 ,  H01J49/0468

摘要： A mass spectrometer having a thermospray ion source, suitable for the analysis of liquid samples is disclosed. The source comprises a strongly heated atomizing nozzle (4) through which the sample is pumped into a spray chamber (5, 11), and an aperture in a cone (26), through which the ions pass through an electrostatic lens (15, 16, 17) into a region (23) in which a mass analyzer is situated. Electrode means (27, 45) generate a repulsive electrostatic field which improves the efficiency of the transmission of ions through the hole in the cone (26). The electrode is situated downstream of the hole in cone (26). By further increasing the potential on the electrode (27, 45) the nature of the ions passing through the hole in the cone (26) can be changed from largely adduct and cluster ions formed by association of solvent molecules with sample ions in the thermospray to largely pseudomolecular sample ions similar to those formed by conventional chemical ionization.

摘要翻译： 公开了一种具有适用于液体样品分析的热喷射离子源的质谱仪。 源包括强烈加热的雾化喷嘴（4），样品通过该雾化喷嘴泵送到喷雾室（5,11）中，以及锥体（26）中的孔，离子通过该孔通过静电透镜（15,16） ，17）进入质量分析器所在的区域（23）中。 电极装置（27,45）产生排斥静电场，这提高离子通过锥体（26）中的孔的透射效率。 电极位于锥体（26）中的孔的下游。 通过进一步增加电极（27,45）上的电位，通过锥体（26）中的孔的离子的性质可以通过在热喷涂中与溶剂分子与样品离子缔合形成的大量加合物和簇离子而变化 大部分假分子样品离子与常规化学电离形成的离子类似。

公开(公告)号：US4543484A

公开(公告)日：1985-09-24

申请号：US466443

申请日：1983-02-15

申请人： Russell G. Meyerand, Jr. ,  David C. Smith

发明人： Russell G. Meyerand, Jr. ,  David C. Smith

IPC分类号： F01D25/32 ,  H01J27/24 ,  B03C3/38

CPC分类号： F01D25/32 ,  H01J27/24

摘要： Small hot particles contained in fluid stream 101 are partially vaporized by laser 46 and deflected transversely to the direction of flow out of interaction region 45 and into removal duct 65. An alternate embodiment ionizes the particles and deflects them by an electric field.

摘要翻译： 包含在流体流101中的小热粒子被激光46部分蒸发，并且横向于从相互作用区域45流出的方向偏转到去除管道65中。替代实施例将颗粒电离并通过电场偏转。