Developer solution and edge bead remover composition
    11.
    发明授权
    Developer solution and edge bead remover composition 有权
    显影剂溶液和边缘珠粒去除剂组合物

    公开(公告)号:US06503694B1

    公开(公告)日:2003-01-07

    申请号:US09878248

    申请日:2001-06-12

    CPC classification number: G03F7/322

    Abstract: A developer solution and edge bead remover. composition includes: (A) water; (B) at least a basic compound; and (C) a non-ionic surfactant having the structure (I):  wherein: R1, R2, R3, R4 and R5 are selected from the group consisting of hydrogen, alkyl, aryl, aralkyl and halogen, and at least two of R1, R2, R3, R4 and RS are selected from the group consisting of aralkyl and aryl, R6 is selected from the group consisting of ethylene, propylene, and butylene, R7 is selected from the group consisting of hydrogen, acetyl, alkyl, and aryl, and n is an integer ranging from 6 to 23.

    Abstract translation: 显影剂溶液和边缘珠粒去除剂。 组合物包括:(A)水;(B)至少一种碱性化合物; 和(C)具有结构(I)的非离子表面活性剂:其中:R1,R2,R3,R4和R5选自氢,烷基,芳基,芳烷基和卤素,R1至少两个 ,R2,R3,R4和RS选自芳烷基和芳基,R6选自乙烯,丙烯和丁烯,R7选自氢,乙酰基,烷基和芳基 ,n为6〜23的整数。

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