公开(公告)号：US20030167781A1

公开(公告)日：2003-09-11

申请号：US10094500

申请日：2002-03-08

Inventor： Taylor Norris Thompson JR. ,  Sanjiv Babubhai Patel

IPC: F25B005/00 ,  F25D023/12

CPC classification number: H01L21/67109 ,  F25B39/02 ,  F25B49/022 ,  F25B2341/0662 ,  F25B2600/02 ,  F25B2700/2117

Abstract: The present invention is directed to heat exchangers for process tools and, in particular, to semiconductor process tools incorporating heat exchangers. In one embodiment, the present invention is directed to a semiconductor process tool heat exchange system. The system includes a heat exchange system and a semiconductor process tool comprising an inlet and an outlet defining a flow path. The heat exchange system includes a compressor fluidly connected to the outlet, a condenser fluidly connected to the compressor and to the inlet, an expander positioned between the condenser and the outlet, and a heat exchange fluid. Examples of process tools suitable for use in this system include cathodes, cold plates, thermal chucks, and the like. In another embodiment, the present invention is directed to a method of exchanging heat in a semiconductor process tool. The method includes supplying a condensed heat exchange fluid to the semiconductor process tool and expanding the condensed heat exchange fluid to an expanded heat exchange fluid within the semiconductor process tool. In another embodiment, the method includes supplying a compressed heat exchange fluid to the semiconductor process tool and condensing the compressed heat exchange fluid to a condensed heat exchange fluid within the semiconductor process tool. Thus, depending on the embodiment, the method is suitable for both cooling and heating a semiconductor process tool.

Abstract translation: 本发明涉及用于加工工具的热交换器，特别涉及结合热交换器的半导体加工工具。 在一个实施例中，本发明涉及半导体工艺工具热交换系统。 该系统包括热交换系统和半导体处理工具，其包括限定流路的入口和出口。 热交换系统包括流体连接到出口的压缩机，流体连接到压缩机和入口的冷凝器，位于冷凝器和出口之间的膨胀器和热交换流体。 适用于该系统的加工工具的实例包括阴极，冷板，热卡盘等。 在另一个实施例中，本发明涉及一种在半导体工艺工具中进行热交换的方法。 该方法包括将冷凝的热交换流体供应到半导体处理工具，并将冷凝的热交换流体膨胀到半导体工艺工具内的膨胀热交换流体。 在另一个实施例中，该方法包括将压缩的热交换流体供应到半导体工艺工具，并将压缩的热交换流体冷凝到半导体工艺工具内的冷凝热交换流体。 因此，根据实施例，该方法适用于冷却和加热半导体工艺工具。

公开(公告)号：US06397616B2

公开(公告)日：2002-06-04

申请号：US09827069

申请日：2001-04-05

Applicant: Kurato Yamasaki ,  Shigeki Ito ,  Teruyuki Hotta ,  Yasushi Yamanaka ,  Atsushi Inaba

Inventor： Kurato Yamasaki ,  Shigeki Ito ,  Teruyuki Hotta ,  Yasushi Yamanaka ,  Atsushi Inaba

IPC: F25B4106

CPC classification number: F25B41/06 ,  F25B2341/0662 ,  F25B2500/01

Abstract: A variable restrict valve is disposed at the upstream side of a refrigerant flow, a fixed restrictor is disposed at the downstream side of the variable restrict valve, an intermediate space is provided between the variable restrict valve and the fixed restrictor, a passage sectional area of the intermediate space is set to be larger than the fixed restrictor and passage length L of the intermediate space is set to be larger than a predetermined length required when the flow of refrigerant injected from the variable restrict valve expands more than the passage sectional area of the fixed restrictor.

Abstract translation: 可变限制阀设置在制冷剂流的上游侧，固定限制器设置在可变限制阀的下游侧，在可变限制阀和固定限制器之间设置有中间空间，通道截面积 中间空间被设定为大于固定限制器，并且中间空间的通道长度L被设定为大于从可变限制阀喷射的制冷剂的流量比所述可变限制阀的通道截面积膨胀的规定长度 固定限流器

公开(公告)号：US06385980B1

公开(公告)日：2002-05-14

申请号：US09713090

申请日：2000-11-15

Applicant: Tobias H. Sienel

Inventor： Tobias H. Sienel

IPC: F25B4100

CPC classification number: F25B9/008 ,  F25B1/10 ,  F25B5/04 ,  F25B31/008 ,  F25B2309/061 ,  F25B2341/0662 ,  F25B2400/13 ,  F25B2400/16 ,  F25B2400/23 ,  F25B2600/05 ,  F25B2600/17 ,  F25B2600/2509 ,  F25B2600/2513

Abstract: A flash tank employing valves for use in transcritical cycles of a vapor compression system to increase the efficiency and/or capacity of the system. Carbon dioxide is preferably used as the refrigerant. The high pressure of the system (gas cooler pressure) is regulated by controlling the amount of charge in the flash tank by actuating valves positioned on the expansion devices located at the entry and exit of the flash tank. If the pressure in the gas cooler is too high or too low, the valves can be adjusted to either store charge in or release charge from the flash tank. By regulating the amount of charge in the flash tank, the high pressure of the system can be controlled to achieve optimal efficiency and/or capacity.

Abstract translation: 一种闪蒸罐，采用用于蒸汽压缩系统的跨临界循环的阀，以提高系统的效率和/或容量。 二氧化碳优选用作制冷剂。 系统的高压（气体冷却器压力）通过控制位于闪蒸罐入口和出口处的膨胀装置上的阀来控制闪蒸罐中的装料量来调节。 如果气体冷却器中的压力太高或太低，则可以调整阀门以将闪存储存器中的电荷储存起来或从闪存储存器中释放电荷。 通过调节闪蒸罐中的电量，可以控制系统的高压，以达到最佳的效率和/或容量。

公开(公告)号：US06343486B1

公开(公告)日：2002-02-05

申请号：US09588198

申请日：2000-06-06

Applicant: Harunobu Mizukami

Inventor： Harunobu Mizukami

IPC: F25B3904

CPC classification number: F25B41/062 ,  F25B9/008 ,  F25B40/00 ,  F25B2309/061 ,  F25B2341/063 ,  F25B2341/0662 ,  F25B2400/16 ,  F25B2600/17

Abstract: A supercritical vapor compression cycle is provided having an improved cooling efficiency in the gas cooler, capable of automatically controlling the necessary circulating coolant quantity by adjusting the high side pressure. The supercritical vapor compression cycle comprises a compressor 1, a gas cooler (radiator) 2, a diaphragm resistor 4a, and evaporators, all of which is connected serially by a pipe 1 so as to form a closed circuit operated at the supercritical pressure at the high side, and further comprises a pressure control valve for controlling the pressure at the outlet of the gas cooler 2 so as to obtain the maximum performance factor of the supercritical vapor compression cycle, a reservoir 5, through which the pipe 6 from the outlet of the evaporator penetrates, for storing the liquid coolant 5a, and a communication pipe 5b communicating the bottom of the reservoir 5 with the pipe 6 connecting the pressure control valve with the diaphragm resistor.

Abstract translation: 提供了一种超临界蒸气压缩循环，其具有在气体冷却器中提高的冷却效率，能够通过调节高侧压来自动控制必要的循环冷却剂量。 超临界蒸汽压缩循环包括压缩机1，气体冷却器（散热器）2，隔膜电阻器4a和蒸发器，它们都由管道1串联连接，以形成在超临界压力下操作的闭路回路 并且还包括用于控制气体冷却器2的出口处的压力以便获得超临界蒸气压缩循环的最大性能因数的压力控制阀，储存器5，通过该储存器5从出口 蒸发器用于存储液体冷却剂5a，以及连通管5b，其将储存器5的底部与连接压力控制阀与隔膜电阻器的管道6连通。

公开(公告)号：US6044655A

公开(公告)日：2000-04-04

申请号：US916634

申请日：1997-08-22

Applicant: Yukikatsu Ozaki ,  Yuichi Sakajo ,  Hisayoshi Sakakibara ,  Kazuhide Uchida

Inventor： Yukikatsu Ozaki ,  Yuichi Sakajo ,  Hisayoshi Sakakibara ,  Kazuhide Uchida

IPC: F25B9/00 ,  F25B40/00 ,  F25B41/06 ,  F25B1/00

CPC classification number: F28D7/106 ,  F25B40/00 ,  F25B41/062 ,  F25B9/008 ,  F25B2309/061 ,  F25B2341/063 ,  F25B2341/0653 ,  F25B2341/0662 ,  F25B2400/13 ,  F25B2600/05 ,  F25B2600/17 ,  F25B2700/1931 ,  F25B2700/1933 ,  F25B2700/2101 ,  F25B2700/2102 ,  F25B2700/2104 ,  F25B2700/2106 ,  F25B2700/21173 ,  F25B2700/21175 ,  Y02B30/72 ,  Y10S62/17

Abstract: A refrigerating system, using CO.sub.2 as a refrigerant, for an air conditioner for an automobile. A pressure at the outlet of the heat emitter 2 is controlled to a target value in accordance with the temperature of the refrigerant at the outlet of the heat emitter for obtaining an operation of the refrigerating system along the optimum control line .eta..sub.max. A pressure reducer 4 and a cooler 5 are provided on a branched passageway 28 branched from a refrigerant recirculating passageway 27 for injection. The cooler 5 is for obtaining a heat exchange between a flow of the refrigerant on the branched passageway 28 after being cooled by the pressure reducer and a flow of the refrigerant on the main passageway 27, thereby cooling the refrigerant directed to the evaporator. In a second aspect of the invention, a means is provided for increasing a target value of the pressure at the pressure reducer when a thermal load of the refrigerating system is high. In a third aspect, a series of pressure reducers are arranged on the main recirculating passageway. The second stage pressure reducer is controlled so as to obtain a desired value of degree of super heating at the inlet of the compressor.

Abstract translation: 一种使用二氧化碳作为制冷剂的制冷系统，用于汽车空调。 根据发热体出口处的制冷剂的温度，将发热体2的出口处的压力控制在目标值，以获得最佳控制线的最大控制线的制冷系统的操作。 减压器4和冷却器5设置在从用于注射的制冷剂再循环通道27分支的分支通道28上。 冷却器5用于在通过减压器冷却后的分支通道28上的制冷剂流与主通道27上的制冷剂流之间获得热交换，从而冷却被引导至蒸发器的制冷剂。 在本发明的第二方面中，提供了一种用于当制冷系统的热负荷高时增加减压器处的压力的目标值的装置。 在第三方面，在主再循环通道上布置有一系列减压器。 控制第二级减压器以获得压缩机入口处的超级加热度的期望值。

公开(公告)号：US5245837A

公开(公告)日：1993-09-21

申请号：US903766

申请日：1992-06-25

Applicant: Manabu Kitamoto

Inventor： Manabu Kitamoto

IPC: F25B1/00 ,  F24F3/06 ,  F24F11/02 ,  F25B13/00 ,  F25B31/00 ,  F25B49/02

CPC classification number: F25B49/022 ,  F24F3/065 ,  F25B13/00 ,  F25B31/002 ,  F25B2313/023 ,  F25B2341/0662 ,  F25B2400/075 ,  F25B2600/021 ,  Y02B30/741

Abstract: An air-conditioning apparatus comprises at least one variable-capability compressor which is contained in a casing together with a lubricating oil, and at least one fixed-capability compressor which is also contained in a casing together with a lubricating oil. The capability of the variable-capability compressor and the number of fixed-capability compressors to be driven, are controlled in accordance with the sum of the air-conditioning loads of a plurality of indoor units. The casings are connected together by means of an oil-balancing pipe. The air-conditioning apparatus further comprises a plurality of oil-balancing devices. These oil-balancing devices are driven on the basis of different control patterns and distribute the lubricating oil between the casings by way of the oil-balancing pipe. The oil-balancing devices are selectively driven in accordance with both the control of the capability of the variable-capability compressor and the control of the number of fixed capability compressors to be driven.

Abstract translation: 一种空气调节装置，包括至少一个与润滑油一起容纳在壳体中的可变能量压缩机，以及至少一个与润滑油一起容纳在壳体中的固定能力的压缩机。 可变能力压缩机的能力和固定能力压缩机的数量可以根据多个室内机组的空调负荷的总和进行控制。 壳体通过油平衡管连接在一起。 该空气调节装置还包括多个油平衡装置。 这些油平衡装置基于不同的控制模式被驱动，并且通过油平衡管在壳体之间分配润滑油。 根据可变能力压缩机的能力的控制和要驱动的固定能力压缩机的数量的控制，选择性地驱动油平衡装置。

公开(公告)号：US4208886A

公开(公告)日：1980-06-24

申请号：US966428

申请日：1978-12-04

Applicant: Wendell E. Maudlin

Inventor： Wendell E. Maudlin

IPC: F25B1/00 ,  F25B41/04

CPC classification number: F25B1/00 ,  F25B41/04 ,  F25B2341/0662

Abstract: An air conditioning system in which a subcooling valve is located in the liquid line fitting upstream from the evaporator creating a pressure drop ahead of the capillary tube to effect liquid subcooling of refrigerant leaving the condenser, thereby resulting in higher cooling capacity and efficiency.

Abstract translation: 一种空调系统，其中过冷却阀位于蒸发器上游的液体管线中，在毛细管之前产生压降，以实现离开冷凝器的制冷剂的液体过冷，从而导致更高的冷却能力和效率。

公开(公告)号：US2960845A

公开(公告)日：1960-11-22

申请号：US71243958

申请日：1958-01-31

Applicant: SPORLAN VALVE CO

Inventor： LANGE HAROLD T

IPC: F25B39/02 ,  F25B41/06

CPC classification number: F25B41/062 ,  F25B39/028 ,  F25B2341/0662 ,  Y10S62/17

公开(公告)号：US2434593A

公开(公告)日：1948-01-13

申请号：US64518546

申请日：1946-02-02

Applicant: CARRIER CORP

Inventor： SCHULZ EDWARD L ,  BAILEY EDWARD A

IPC: F25B41/04 ,  F25B41/06

CPC classification number: F25B41/04 ,  F25B41/062 ,  F25B2341/065 ,  F25B2341/0662 ,  Y02B30/72

公开(公告)号：US2047799A

公开(公告)日：1936-07-14

申请号：US68707033

申请日：1933-08-26

Applicant: JUSTIN W MACKLIN

Inventor： RODMAN CLARENCE A

IPC: F25B41/06

CPC classification number: F25B41/062 ,  F25B2341/0652 ,  F25B2341/0662 ,  Y02B30/72