公开(公告)号：US11527450B2

公开(公告)日：2022-12-13

申请号：US16765430

申请日：2020-04-21

Applicant: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Gang Tan

IPC: H01L27/12 ,  H01L29/788 ,  H01L21/66 ,  H01L29/786

Abstract: A test element group (TEG) test key of an array substrate and a display panel thereof are provided. The TEG test key of the array substrate includes a glass substrate, a multi-buffer layer, an active layer, a gate insulating layer, a gate electrode layer, an interlayer insulating layer, a source and drain electrode layer, and an organic planarization layer stacked in sequence. The TEG test key of the array substrate is defined with two test zones and a connecting zone, and each test zone is provided with a groove exposing the gate electrode layer. The gate electrode layer in the test zones is electrically connected to the source and drain electrode layer in the connecting zone.