Raman spectroscopy using diffractive MEMS
    1.
    发明授权
    Raman spectroscopy using diffractive MEMS 有权
    使用衍射MEMS的拉曼光谱

    公开(公告)号:US09194743B2

    公开(公告)日:2015-11-24

    申请号:US14629858

    申请日:2015-02-24

    Abstract: A Raman spectrometer including a laser excitation source, edge filters, and detection optics that direct light into a spectrograph. A spectrograph containing a dispersive element and optics that directs various wavelengths of light onto a segmented diffractive MEMS light modulator array. The MEMS array, depending on actuation state, directs light either to or away from a single detector. Control electronics drive the MEMS light modulator for either sequential wavelength measurement or multiplexed wavelength measurement (Hadamard for example).

    Abstract translation: 拉曼光谱仪包括激光源,边缘滤光片以及将光引入光谱仪的检测光学器件。 包含分散元件和光学元件的光谱仪,其将各种波长的光引导到分段的衍射MEMS光调制器阵列上。 取决于致动状态的MEMS阵列将光指向或远离单个检测器。 控制电子驱动MEMS光调制器用于顺序波长测量或多路复用波长测量(例如Hadamard)。

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