公开(公告)号：US10060825B2

公开(公告)日：2018-08-28

申请号：US15255490

申请日：2016-09-02

Applicant: TRIOPTICS GmbH

Inventor： Aiko Ruprecht ,  Patrik Erichsen ,  Daniel Winters

IPC: G01J3/28 ,  G01M11/02 ,  G01J3/02 ,  G01J3/14

CPC classification number: G01M11/0292 ,  G01J3/0229 ,  G01J3/14 ,  G01J3/2803 ,  G01M11/0285

Abstract: An apparatus for measuring a wavelength-dependent optical characteristic of an optical system has a light-pattern generation device which generates a pattern of polychromatic light in an object plane. Together with the optical system, a measuring optical unit images the object plane on a spatially resolving light sensor. A dispersive optical element is arranged in a light path between the optical system and the light sensor in such a way that a plurality of images of the pattern with different wavelengths are generated simultaneously on the light sensor. The evaluation device determines the wavelength-dependent characteristic of the optical system from the plurality of images on the light sensor.

公开(公告)号：US20170059447A1

公开(公告)日：2017-03-02

申请号：US15255490

申请日：2016-09-02

Applicant: TRIOPTICS GmbH

Inventor： Aiko Ruprecht ,  Patrik Erichsen ,  Daniel Winters

IPC: G01M11/02 ,  G01J3/02 ,  G01J3/14 ,  G01J3/28

CPC classification number: G01M11/0292 ,  G01J3/0229 ,  G01J3/14 ,  G01J3/2803 ,  G01M11/0285

Abstract: An apparatus for measuring a wavelength-dependent optical characteristic of an optical system has a light-pattern generation device which generates a pattern of polychromatic light in an object plane. Together with the optical system, a measuring optical unit images the object plane on a spatially resolving light sensor. A dispersive optical element is arranged in a light path between the optical system and the light sensor in such a way that a plurality of images of the pattern with different wavelengths are generated simultaneously on the light sensor. The evaluation device determines the wavelength-dependent characteristic of the optical system from the plurality of images on the light sensor.

Abstract translation: 用于测量光学系统的波长相关光学特性的装置具有在物平面中产生多色光图案的光图案生成装置。 与光学系统一起，测量光学单元在空间分辨的光传感器上成像物体平面。 色散光学元件被布置在光学系统和光传感器之间的光路中，使得在光传感器上同时产生具有不同波长的图案的多个图像。 评估装置根据光传感器上的多个图像确定光学系统的波长相关特性。