摘要:
A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.
摘要:
A light deflector includes a substrate; a plurality of control members provided at edge parts of the substrate, the control members having upper parts where stoppers are situated; a fulcrum member provided on an upper surface of the substrate, the fulcrum member having a top part; a plate-shaped member movably provided in a space formed by the substrate, the fulcrum member and the stopper, the plate-shaped member having a light reflection area, no fixed end, and a conductive layer; and a plurality of electrodes provided on the substrate, the electrodes facing the conductive layer of the plate-shaped member.
摘要:
An optical deflection device includes a substrate; a plurality of regulating members including upper portions including stoppers; a fulcrum member serving as an electrode; a plate member; and a plurality of electrodes. The plurality of regulating members, the fulcrum member, and the plurality of electrodes are provided on the substrate, with the plate member approximately opposite to the plurality of electrodes and movable in a space formed by the substrate, the fulcrum member, and the stoppers. The plate member includes unfixed edge portions, a light reflecting region, and a conductive layer electrically connected to the fulcrum member. By fixing at least a part of the plurality of electrodes to predetermined potentials and changing a potential of the fulcrum member, the plate member is displaced around the fulcrum member by electrostatic attraction force, and a light incident in the light reflecting region in a direction is deflected and reflected in another direction.
摘要:
An optical deflecting device includes a plate-like member having a light reflective area and a conductor layer. The plate-like member rotates with substantially the middle portion thereof made a fulcrum to change an inclination direction thereof and thereby a reflection direction of a light flux incident to the light reflective area is changed. A first electrode group and a second electrode group are arranged so as to oppose the conductor layer of the plate-like member, respectively, and to sandwich a position corresponding to a position of the fulcrum of the plate-like member. Each electrode group includes a control electrode controlling starting of the plate-like member and a drive electrode driving the plate-like member.
摘要:
An optical deflection device includes a substrate; a plurality of regulating members including upper portions including stoppers; a fulcrum member serving as an electrode; a plate member; and a plurality of electrodes. The plurality of regulating members, the fulcrum member, and the plurality of electrodes are provided on the substrate, with the plate member approximately opposite to the plurality of electrodes and movable in a space formed by the substrate, the fulcrum member, and the stoppers. The plate member includes unfixed edge portions, a light reflecting region, and a conductive layer electrically connected to the fulcrum member. By fixing at least a part of the plurality of electrodes to predetermined potentials and changing a potential of the fulcrum member, the plate member is displaced around the fulcrum member by electrostatic attraction force, and a light incident in the light reflecting region in a direction is deflected and reflected in another direction.
摘要:
A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.
摘要:
Bearing portions having an approximately arc shape are provided on a lower surface of a plate-shaped member. In the bearing portions, stoppers of a regulating member are embedded. With the engagement of the lower surface of the plate-shaped member and the apex of a pivot member and the engagement of an inner surface of the bearing portions and a lower surface of the stoppers, the plate-shaped member is rotatably supported with the apex of the pivot member as a center. With a side surface of the regulating member 109 facing a side surface of the bearing portions, the position of the plate-shaped member in a rotation axis direction is regulated.
摘要:
A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.
摘要:
An actuator is disclosed that has a contacting part smaller than a processing limit of a lithography technique, and is able to reduce a contacting area or a contacting length of the contacting part during operation, reduce a sticking force induced by contact, and decrease a driving voltage of the actuator. The actuator includes an operating part and a contacting part in contact with the operating part. The contacting part is formed by overlapping a first pattern on an end of a second pattern. The first pattern has a solid structure and the size of an upper portion of the solid structure of the first pattern on the second pattern is less than a processing resolving power or resolution.
摘要:
A method for driving an optical deflecting device array is disclosed, including in a series of processes for the light deflection operation, at least, a state of a first stage writing and recording data for indicating an inclination direction of the plate member to incline in a first inclination direction or a second inclination direction, into a semiconductor memory device arranged immediately under or adjacent to each of the plurality of optical deflecting devices; a state of a second stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the first inclination direction based on an indication of the data, and deflecting light; and a state of a third stage switching the inclination direction of the plate member of the arbitrary optical deflecting device to the second inclination direction based on the indication of the data, and deflecting light.