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公开(公告)号:US12297379B2
公开(公告)日:2025-05-13
申请号:US18404861
申请日:2024-01-04
Applicant: Samsung Electronics Co., Ltd.
Inventor: Mun Ja Kim , Byungchul Yoo , Haeshin Lee , Chang Young Jeong , Yunhan Lee
Abstract: An adhesive composition, a method for preparing the same, a reticle assembly including the same, and a method for fabricating the reticle assembly including the same are provided. The adhesive composition includes a polyphenol compound including tannic acid, a polymer including polyvinyl alcohol, and a solvent including water and alcohol.
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公开(公告)号:US20250068050A1
公开(公告)日:2025-02-27
申请号:US18678622
申请日:2024-05-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Munja Kim , Jongju Park , Byunghoon Lee , Yunhan Lee
IPC: G03F1/24
Abstract: A photomask assembly includes a mask pattern providing an upper surface and including a plurality of pins extending in a vertical direction with respect to the upper surface, a pellicle membrane disposed to be spaced apart from the mask pattern in the vertical direction, and a frame assembly configured to support the pellicle membrane, wherein the frame assembly includes a frame body having a plurality of pin holes configured to respectively fasten the plurality of pins, a first magnetic member configured to surround the plurality of pin holes inside the frame body and generate an attractive force on the plurality of pins, and a second magnetic member disposed in a lower portion of the frame body and configured to generate an attractive force on the upper surface of the mask pattern.
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公开(公告)号:US12018183B2
公开(公告)日:2024-06-25
申请号:US17516428
申请日:2021-11-01
Applicant: Samsung Electronics Co., Ltd.
Inventor: Mun Ja Kim , Byungchul Yoo , Haeshin Lee , Chang Young Jeong , Yunhan Lee
Abstract: An adhesive composition, a method for preparing the same, a reticle assembly including the same, and a method for fabricating the reticle assembly including the same are provided. The adhesive composition includes a polyphenol compound including tannic acid, a polymer including polyvinyl alcohol, and a solvent including water and alcohol.
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