公开(公告)号：US10168622B2

公开(公告)日：2019-01-01

申请号：US15628611

申请日：2017-06-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yibing M. Wang ,  Duhyun Lee

IPC: G03F7/20 ,  G02F1/017 ,  G02F1/01

Abstract: MQW devices, IC chips and methods may be used in semiconductor lithography patterning systems. An MQW device includes an array of pixels that have transmission elements and associated support circuits. The support circuits have preliminary memory cells and final memory cells. The final memory cells store transmittance values that control transmittances of the associated transmission elements. This way, exposure of a target with a lithography system for purposes of patterning the target may be performed through the transmission elements according to the controlled transmittances, while subsequent transmittance values are being received by the preliminary memory cells from memory banks. The exposure of the target therefore needs to pause for less time, in order to wait for the MQW device to be refreshed with the subsequent transmittance values. Accordingly the whole semiconductor lithography patterning system may operate faster and thus have more throughput.

公开(公告)号：US09973716B2

公开(公告)日：2018-05-15

申请号：US14242919

申请日：2014-04-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yibing M. Wang ,  Hongyu Wang ,  Tae-Chan Kim

IPC: H04N5/357 ,  H04N5/363

CPC classification number: H04N5/3575 ,  H04N5/363

Abstract: Provided are an imaging device implementing pseudo correlated double sampling (CDS), and an imaging method and a control method of the image device. The imaging device includes: a pixel array comprising a pixel configured to generate a current in response to incident light; a readout circuit configured to read out a plurality of output signals of the pixel, the plurality of output signals corresponding to a plurality of consecutive integration periods of the pixel within an aggregating period; and an aggregator configured to aggregate the plurality of output signals read out by the readout circuit to obtain a final aggregated output corresponding to illuminance for the aggregating period, wherein the readout circuit is configured to read out the plurality of output signals by, for each output signal, sampling a signal voltage of the pixel and sampling a subsequent reset voltage of the pixel and obtaining a difference therebetween.

公开(公告)号：US09277136B2

公开(公告)日：2016-03-01

申请号：US14210369

申请日：2014-03-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ilia Ovsiannikov ,  Gregory M. Waligorski ,  Deokha Shin ,  Wang-Hyun Kim ,  Yibing M. Wang ,  Hongyu Wang

IPC: H04N5/235

CPC classification number: H04N5/2353 ,  G01S17/89

Abstract: Imaging systems, such as time-of-flight imaging systems, and methods with pixel sensitivity adjustments. An embodiment includes a method, comprising: for a plurality of pixels having a first output and a second output, measuring the first outputs and the second outputs in response to a demodulation signal; and adjusting the demodulation signal such that a combination of the first outputs is substantially similar to a combination of the second outputs.

Abstract translation: 成像系统，如飞行时间成像系统，以及具有像素灵敏度调整的方法。 实施例包括一种方法，包括：对于具有第一输出和第二输出的多个像素，响应于解调信号测量第一输出和第二输出; 以及调整所述解调信号，使得所述第一输出的组合基本上类似于所述第二输出的组合。