公开(公告)号：US20150338206A1

公开(公告)日：2015-11-26

申请号：US14667930

申请日：2015-03-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sangwook PARK ,  Sang-Hyun PARK ,  Taekyu SON ,  Sangdon JANG

IPC: G01B11/14

CPC classification number: G01B11/14 ,  G01B9/02016

Abstract: Measuring systems and methods using the same may be provided. For example, the measuring system including a first reference member located at one of a first target member and a second target member, the first and second target members being configured to make a relative movement with respect to each other and the first reference member having a first length, a second reference member located at the other of the first target member and the second target member and having a second length, and a measuring unit located at a distance from the first reference member and the second reference member, the measuring unit configured to measure a relative location of one of the first reference member and the second reference member with respect to the other may be provided.

Abstract translation: 可以提供使用其的测量系统和方法。 例如，测量系统包括位于第一目标构件和第二目标构件中的一个上的第一参考构件，第一和第二目标构件被构造成相对于彼此进行相对运动，并且第一参考构件具有 第一长度，位于第一目标构件和第二目标构件中的另一个并且具有第二长度的第二参考构件和位于距第一参考构件和第二参考构件一定距离的测量单元，该测量单元构造成 可以提供测量第一参考构件和第二参考构件之一相对于另一个的相对位置。