公开(公告)号：US20250157809A1

公开(公告)日：2025-05-15

申请号：US18934625

申请日：2024-11-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daeun Kim ,  Seung-Min Ryu ,  Gyu-Hee Park ,  Joongjin Park ,  Sangick Lee ,  Sanghun Lee ,  Seunghyeon Lee ,  Sejin Jang ,  Youn Joung Cho

IPC: H01L21/02 ,  C07C319/20 ,  C23C16/40 ,  C23C16/44 ,  C23C16/455

Abstract: A thin-film forming composition includes an aluminum compound represented by General Formula (1). In General Formula (1), X1, X2, and X3 are each independently a halogen atom, R1 and R2 are each independently a C1-C5 alkyl group, and Y1 is a chalcogen atom.