公开(公告)号：US20200373186A1

公开(公告)日：2020-11-26

申请号：US16703062

申请日：2019-12-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hoe Chul Kim ,  Seok Ho Kim ,  Tae Yeong Kim ,  Hoon Joo Na ,  Hyung Jun Jeon

IPC: H01L21/683 ,  H01L21/677 ,  H01L23/00

Abstract: A wafer bonding apparatus is provided includes a lower support plate configured to structurally support a first wafer on an upper surface of the lower support plate; a lower structure adjacent to the lower support plate and movable in a vertical direction that is perpendicular to the upper surface of the lower support plate, an upper support plate configured to structurally support a second wafer on a lower surface of the lower support plate, and an upper structure adjacent to the upper support plate and movable in the vertical direction.

公开(公告)号：US11728200B2

公开(公告)日：2023-08-15

申请号：US16703062

申请日：2019-12-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hoe Chul Kim ,  Seok Ho Kim ,  Tae Yeong Kim ,  Hoon Joo Na ,  Hyung Jun Jeon

IPC: H01L21/683 ,  H01L23/00 ,  H01L21/677

CPC classification number: H01L21/6836 ,  H01L21/67757 ,  H01L24/94

Abstract: A wafer bonding apparatus is provided includes a lower support plate configured to structurally support a first wafer on an upper surface of the lower support plate; a lower structure adjacent to the lower support plate and movable in a vertical direction that is perpendicular to the upper surface of the lower support plate, an upper support plate configured to structurally support a second wafer on a lower surface of the lower support plate, and an upper structure adjacent to the upper support plate and movable in the vertical direction.

公开(公告)号：US10833047B2

公开(公告)日：2020-11-10

申请号：US16354359

申请日：2019-03-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hoe Chul Kim ,  Dong Eog Kim ,  Tae Yeong Kim

IPC: H01L23/00

Abstract: A substrate bonding apparatus includes a lower chuck, an upper chuck, an electric actuator on a central portion of the upper chuck, a pressure sensor, and a controller. The lower chuck may support a lower substrate, the upper chuck may face the lower chuck such that a lower surface of the upper chuck faces the upper surface of the lower chuck, and the upper chuck may support an upper substrate. The electric actuator may lower a bonding pin through the upper chuck to apply a pressure to the upper substrate supported on the upper chuck. The pressure sensor may be below the lower substrate supported on the lower chuck. The pressure sensor may sense a lowering pressure applied by the bonding pin to the pressure sensor in real time. The controller may control the lowering pressure applied by the bonding pin.