公开(公告)号：US20250013143A1

公开(公告)日：2025-01-09

申请号：US18442250

申请日：2024-02-15

Applicant: Samsung Electronics Co., Ltd.

Inventor： Yunhan LEE ,  Goonmo KOO ,  Mun Ja KIM

IPC: G03F1/64 ,  G03F1/66

Abstract: A pellicle assembly may include a pellicle frame configured to provide a first opening, a pellicle on the pellicle frame, and a plurality of pellicle electrodes arranged along an edge of the pellicle and spaced apart from each other. The pellicle may include a pellicle border having a shape of a tetragonal or rectangular frame, and a pellicle membrane placed on and coupled to a top surface of the pellicle border. Each of the pellicle electrodes may include a contact member placed on and in contact with a top surface of the pellicle membrane.