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公开(公告)号:US08617944B2
公开(公告)日:2013-12-31
申请号:US13783083
申请日:2013-03-01
Applicant: Samsung Display Co., Ltd.
Inventor: Byeong-Jin Lee , Hong-Sik Park , Sang-Tae Kim , Joon-Woo Lee , Young-Chul Park , Young-Jun Jin , Suck-Jun Lee , Seung-Jae Yang , O-Byoung Kwon , In-Ho Yu , Sang-Hoon Jang , Min-Ki Lim , Hye-Ra Shin , Yu-Jin Lee
IPC: H01L21/00 , H01L21/302
CPC classification number: H01L29/401 , C09K13/06 , H01L27/124 , H01L31/022475 , H01L31/022483 , H01L31/1884 , Y02E10/50
Abstract: An etchant composition for etching a transparent electrode is provided, the etchant composition includes an inorganic acid, an ammonium (NH4+)-containing compound, a cyclic amine compound, and the remaining amount of water.
Abstract translation: 提供了用于蚀刻透明电极的蚀刻剂组合物,蚀刻剂组合物包括无机酸,含铵(NH 4 +)的化合物,环胺化合物和剩余量的水。