公开(公告)号：US20200176681A1

公开(公告)日：2020-06-04

申请号：US16598910

申请日：2019-10-10

Applicant: Samsung Display Co., Ltd.

Inventor： Jaesoo HA ,  Suhwan LEE ,  Kwangtae YU ,  Seungwook CHANG

IPC: H01L51/00 ,  C23C14/04 ,  H01L51/56

Abstract: Provided is a mask assembly. The mask assembly includes a mask frame and a mask. The mask is coupled to the mask frame to distinguish first to third deposition areas from each other. Each of the first and third deposition areas has a first width greater than a reference width in a first direction and a second width less than the first width in a second direction. The second deposition area has a third width less than the first width in the first direction and a fourth width less than the reference width in the second direction.