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公开(公告)号：US20170233864A1
公开(公告)日：2017-08-17
申请号：US15433362
申请日：2017-02-15
Applicant: Samsung Display Co., Ltd.
Inventor： Jinwoo PARK , Jungho PARK , Suhwan LEE
CPC classification number: C23C14/243
Abstract: A metal deposition source assembly includes a housing, a crucible disposed inside the housing, a heater disposed between the housing and the crucible, a nozzle disposed at an upper portion of the housing, and a bead layer disposed inside the crucible, the bead layer including a plurality of beads.
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