公开(公告)号：US20140291619A1

公开(公告)日：2014-10-02

申请号：US13941433

申请日：2013-07-12

Applicant: Samsung Display Co., Ltd.

Inventor： Su-Hwan Lee ,  Mu-Hyun Kim ,  Ji-Hoon Kang

IPC: H01L27/32 ,  H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C14/568 ,  H01L27/3211

Abstract: A method for manufacturing an organic light emitting display apparatus includes forming a layer by depositing on a substrate a deposition material emitted from a deposition assembly while conveying the substrate with respect to the deposition assembly. In the forming of the layer, at least two layers of a first layer including a deposition material emitted from a first deposition source, a second layer including deposition materials emitted from the first deposition source and a second deposition source, and a third layer including a deposition material emitted from the second deposition source, are deposited on the substrate by using an angle restriction unit.

Abstract translation: 一种用于制造有机发光显示装置的方法包括：通过在衬底上沉积从沉积组件发射的沉积材料来形成层，同时相对于沉积组件输送衬底。 在层的形成中，至少两层包括从第一沉积源发射的沉积材料的第一层，包括从第一沉积源发射的沉积材料的第二层和第二沉积源，以及第三层， 通过使用角度限制单元将从第二沉积源发射的沉积材料沉积在基板上。