公开(公告)号：US20220290288A1

公开(公告)日：2022-09-15

申请号：US17513203

申请日：2021-10-28

Applicant: Samsung Display Co., LTD.

Inventor： Jae Min HONG ,  Jong Hyoek RYU ,  Seung Min JIN

IPC: C23C14/04 ,  C23C14/56 ,  H01L27/32

Abstract: A magnet assembly includes a support plate and a plurality of magnets which are removably fixed to the support plate and applies a magnetic force to a deposition mask. Each magnet among the plurality of magnets include a first surface facing the support plate, a second surface opposite to the first surface and facing the deposition mask, and a magnet groove defined therein.

公开(公告)号：US20240044001A1

公开(公告)日：2024-02-08

申请号：US18336207

申请日：2023-06-16

Applicant: Samsung Display Co., LTD.

Inventor： YOUNGSUN CHO ,  JUNHYEUK KO ,  MYUNGKYU KIM ,  YOUNG KWANG LEE ,  Seung Min JIN ,  Jae Min HONG

IPC: C23C16/458 ,  C23C16/04

CPC classification number: C23C16/458 ,  C23C16/042

Abstract: A deposition apparatus according to an embodiment includes a deposition source, and a deposition portion that faces the deposition source. The deposition portion is disposed at an angle of about 4 degrees to about 14 degrees with respect to an imaginary vertical line that is perpendicular to ground. The deposition portion includes a frame including an opening, and an outer portion disposed around the opening, a substrate disposed on a first side of the frame, and a plurality of back stages disposed on a second side opposite to the first side of the frame. The frame moves by movement of the plurality of back stages.