公开(公告)号：US20240102146A1

公开(公告)日：2024-03-28

申请号：US18347799

申请日：2023-07-06

Applicant: Samsung Display Co., LTD.

Inventor： JEONG-SU KIM ,  JEYUN RYU

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24

Abstract: Provided are an apparatus for manufacturing a mask assembly, a method for calculating auto-teaching data using the same, and a method of manufacturing a mask assembly using position correction values calculated by auto-teaching data calculation. The apparatus for manufacturing a mask assembly includes a processing unit including a stage, a mask, a mask frame, and marking parts, a first gantry disposed on the processing unit and movable in a first direction, a second gantry connected to the first gantry and movable in a second direction intersecting the first direction, a photographing unit connected to the second gantry and that photographs the marking parts, and a movement control unit that controls movements of the first gantry and the second gantry.