公开(公告)号：US20200209063A1

公开(公告)日：2020-07-02

申请号：US16536944

申请日：2019-08-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyeonghun KIM ,  Jeongil MUN ,  Hyung Joo LEE ,  Jongwoo SUN

IPC: G01J3/443 ,  H01J37/32

Abstract: A substrate processing module includes a process chamber configured to perform a treatment process on a substrate; a transfer chamber provided on a first side of the process chamber, the substrate being transferred between the process chamber and the transfer chamber; an optical emission spectroscopy (OES) system provided on a second side of the process chamber and configured to monitor the process chamber; and a reference light source disposed in the transfer chamber and configured to emit a reference light to calibrate the OES system.

公开(公告)号：US20210148760A1

公开(公告)日：2021-05-20

申请号：US17162665

申请日：2021-01-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kyeonghun KIM ,  Jeongil Mun ,  Hyung Joo Lee ,  Jongwoo Sun

IPC: G01J3/443 ,  H01J37/32

Abstract: A substrate processing module includes a process chamber configured to perform a treatment process on a substrate; a transfer chamber provided on a first side of the process chamber, the substrate being transferred between the process chamber and the transfer chamber; an optical emission spectroscopy (OES) system provided on a second side of the process chamber and configured to monitor the process chamber; and a reference light source disposed in the transfer chamber and configured to emit a reference light to calibrate the OES system.