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公开(公告)号:US20200013740A1
公开(公告)日:2020-01-09
申请号:US16283906
申请日:2019-02-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: JIN-KUK BAE , Hyun-Soo Chung , Han-Sung Ryu , In-Young Lee , Chan-Ho Lee
IPC: H01L23/00
Abstract: A semiconductor chip includes a substrate. An electrode pad is disposed on the substrate. The electrode pad includes a low-k material layer. A first protection layer at least partially surrounds the electrode pad. The first protection layer includes a first opening at an upper portion thereof. A buffer pad is electrically connected to the electrode pad. A second protection layer at least partially surrounds the buffer pad. The second protection layer includes a second opening at an upper portion thereof. A pillar layer and a solder layer are sequentially stacked on the buffer pad. A thickness of the buffer pad is greater than a thickness of the electrode pad. A width of the first opening in a first direction parallel to an upper surface of the semiconductor substrate is equal to or greater than a width of the second opening in the first direction.