公开(公告)号：US20250147096A1

公开(公告)日：2025-05-08

申请号：US18790237

申请日：2024-07-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaewon Yang ,  Younghoon Sohn ,  Souk Kim ,  Jaeho Kim ,  Jongbeom Kim ,  HyeonBo Shim ,  Minho Rim

IPC: G01R31/265

Abstract: A substrate inspection apparatus includes a laser light source configured to emit a laser beam, an optical splitter configured to split the laser beam into a first laser beam and a second laser beam, a delay stage configured to change a relative time delay of the second laser beam and optically connected to the optical splitter, a first modulator optically connected to the optical splitter and configured to change the first laser beam, and a feedback system configured to sense the second laser beam reflected from a substrate and configured to apply electrical feedback to the first modulator.