公开(公告)号：US20250151438A1

公开(公告)日：2025-05-08

申请号：US18937958

申请日：2024-11-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jongwoo HONG ,  Changhyun KIM ,  Byoungho LEE ,  Youngjin KIM ,  Gun-Yeal LEE ,  Junhyeok JANG ,  Yoonchan JEONG

IPC: H01L27/146 ,  G06F30/23

Abstract: A method of manufacturing a color-routing element, may include: generating an initial pattern; performing blurring on the initial pattern to generate a reference pattern; performing edge detection on the reference pattern to generate at least one comparison pattern reflecting a process error; performing a simulation to obtain at least one color-routing figure of merit based on the reference pattern and the at least one comparison pattern; updating the initial pattern based on a calculation result of the at least one color-routing figure of merit; generating the updated initial pattern as a target pattern of the color-routing element; and manufacturing the color-routing element based on the target pattern.