公开(公告)号：US20180040496A1

公开(公告)日：2018-02-08

申请号：US15475622

申请日：2017-03-31

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chunghun LEE ,  Janghwan KIM ,  Kwanghyun CHO ,  Youngho HWANG

IPC: H01L21/683 ,  H05B3/22 ,  H01L21/67 ,  H05B1/02

CPC classification number: H01L21/6833 ,  H01L21/67103 ,  H01L21/67248 ,  H05B1/0233 ,  H05B3/22 ,  H05B2203/005 ,  H05B2203/035 ,  H05B2213/03

Abstract: An electrostatic chuck system includes a first heater, a second heater, a chiller, and a controller. The first heater includes a plurality of resistors connected to a plurality of row wiring lines and a plurality of column wiring lines in a matrix form. The second heater includes a heater electrode in a concentric shape or a spiral shape. The chiller chills the first heater or the second heater. The controller controls the first heater, the second heater, and the chiller. The controller switches the row wiring lines and the column wiring lines of the first heater in a time-division manner to provide a power pulse to heat the resistors and a detect pulse to monitor a real-time resistance value or a real-time temperature of each of resistors connected to selected row wiring lines.