公开(公告)号：US20230215013A1

公开(公告)日：2023-07-06

申请号：US17960324

申请日：2022-10-05

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Myoungchul Kim ,  Eonpil Shin ,  Donghoon Lee ,  Taejun Kim ,  Jihoon Seo ,  Moonkyoung Yong ,  Jiyong Jung

IPC: G06T7/174 ,  G06T7/11

CPC classification number: G06T7/174 ,  G06T7/11 ,  G06T2207/30148

Abstract: A substrate inspection apparatus includes: an image sensor which obtains first image data of a first substrate and second image data of a second substrate; and a processor which obtains synthetic image data by using the first and second image data, where the processor obtains first first spot information and first non-spot information of a first first spot area and a first non-spot area on the first substrate, based on the first image data, obtain first second spot information and second non-spot information of a first second spot area and a second non-spot area on locations on the second substrate corresponding to locations of the first first spot area and the first non-spot area on the first substrate, based on the second image data, and obtain the synthetic image data by using the first first spot information, the first second spot information and the first and second non-spot information.