公开(公告)号：US09379686B2

公开(公告)日：2016-06-28

申请号：US14196355

申请日：2014-03-04

Applicant: QUALCOMM Incorporated

Inventor： Changhan Hobie Yun ,  Chengjie Zuo ,  Jonghae Kim ,  Mario Francisco Velez ,  Daeik Daniel Kim ,  Rick Allen Wilcox

IPC: H03H9/13 ,  H03H9/15 ,  H03H9/54 ,  H03H9/02 ,  H03H9/46 ,  H03H3/02

CPC classification number: H03H9/02448 ,  H03H3/02 ,  H03H9/02133 ,  H03H9/02228 ,  H03H9/02244 ,  H03H9/132 ,  H03H9/133 ,  H03H9/15 ,  H03H9/462 ,  H03H9/54 ,  H03H2003/027

Abstract: An integrated circuit device includes a piezoelectric substrate having a first surface and a second surface opposite the first surface. The device also includes a first electrode and a second electrode on the first surface of the piezoelectric substrate, the first electrode having a first width and the second electrode having a second width. The device further includes a third electrode and a fourth electrode on the second surface of the piezoelectric substrate, the third electrode having a third width that is substantially the same as the second width, and the fourth electrode having a fourth width that is substantially the same as the first width. The first and third electrodes operate as part of a first portion of a microelectromechanical systems (MEMS) resonator, and the second and fourth electrodes operate as part of a second portion of the MEMS resonator.

Abstract translation: 集成电路装置包括具有第一表面和与第一表面相对的第二表面的压电基片。 该装置还包括在压电基片的第一表面上的第一电极和第二电极，第一电极具有第一宽度，第二电极具有第二宽度。 该装置还包括在压电基片的第二表面上的第三电极和第四电极，第三电极具有与第二宽度基本相同的第三宽度，第四电极具有基本相同的第四宽度 作为第一宽度。 第一和第三电极作为微机电系统（MEMS）谐振器的第一部分的一部分工作，第二和第四电极作为MEMS谐振器的第二部分的一部分工作。