OPTICAL REFLECTIVE ELEMENT
    1.
    发明申请

    公开(公告)号:US20250013035A1

    公开(公告)日:2025-01-09

    申请号:US18892660

    申请日:2024-09-23

    Abstract: An optical reflective element includes: a movable part having a mirror formed therein; a fixation part supporting the movable part; a meander-type vibration plate placed between the movable part and the fixation part; a coupling beam coupling the vibration plate to the movable part; a drive part placed on the vibration plate and configured to rotate the movable part about a rotation axis; and a stopper placed adjacent to at least one of the vibration plate and the coupling beam in a direction parallel to the rotation axis and configured to restrict at least displacement of the vibration plate.

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