公开(公告)号：US20220018716A1

公开(公告)日：2022-01-20

申请号：US17310743

申请日：2020-02-17

申请人： PYREOS LTD.

发明人： John PHAIR ,  Lutz ECKART

IPC分类号： G01J5/34 ,  G01J5/02 ,  G01J5/04 ,  H01L37/02

摘要： The invention relates to a microsystem (1) comprising a substrate (12), a bottom electrode (3) arranged on the substrate (12), a ferroelectric layer (4) arranged on the bottom electrode (3), a top electrode (5) arranged on the ferroelectric layer (4) and an isolation layer (6) that is electrically isolating, that is arranged on the top electrode (5), that extends from the top electrode (5) to the substrate (12) so that the isolation layer (6) covers the bottom electrode (3), the ferroelectric layer (4) and the substrate (12) in a region around the complete circumference of the bottom electrode (3), and the isolation layer (6) has the shape of a ring that confines in its centre a through hole (11) that is arranged in the region of the top electrode (5).