公开(公告)号：US3601492A

公开(公告)日：1971-08-24

申请号：US3601492D

申请日：1967-11-20

Applicant: MONSANTO CO

Inventor： REICHARD THOMAS E

IPC: G01B11/06 ,  G01J3/06 ,  G01J3/28 ,  G01B9/02

CPC classification number: G01J3/28 ,  G01B11/0675 ,  G01J3/06

Abstract: Improved means and method for measuring film thickness by rapidly forming and portraying optical interference fringe spectra and interpreting the same directly in terms of film thickness. An internal computer senses movement of a wavelength reference member and causes programmed indices to be displayed along with the interference fringe waveform. A single manual control, with the aid of an improved scanning and display method which balances out time lags, allows the indices to be coordinated with the fringe waveform. An automatic thickness readout device cooperates with the manual control.