公开(公告)号：US20020114715A1

公开(公告)日：2002-08-22

申请号：US10051082

申请日：2002-01-22

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Euisik Yoon ,  Kwang-Seok Yun

IPC: F04B017/00

CPC classification number: F04B43/06 ,  F04B17/00 ,  F04B43/043

Abstract: The present invention relates to a micropump which is driven by movement of a liquid drop based upon continuous electrowetting actuation. The continuous electrowetting means a phenomenon that the liquid drop moves as the surface tension of the liquid drop is electrically varied in succession. When a tube in which electrolyte and a liquid metal drop are inserted is applied with voltage having periodically changing polarity via metal electrodes, the surface tension of the liquid metal is varied so that the liquid metal drop reciprocates in the tube generating pressure or force, which is used as a driving force of the micropump. The micropump is operated in a low voltage and consumes a small amount of electric power.

Abstract translation: 本发明涉及一种通过基于连续电润湿致动的液滴运动来驱动的微型泵。 连续电润湿是指液滴随着液滴的表面张力依次电性变化而移动的现象。 当其中插入电解质和液态金属液滴的管通过金属电极施加具有周期性变化的极性的电压时，液态金属的表面张力变化，使得液体金属液滴在管中产生压力或力而往复运动，其中 被用作微型泵的驱动力。 微型泵在低电压下工作，消耗少量的电力。

公开(公告)号：US20040012460A1

公开(公告)日：2004-01-22

申请号：US10342350

申请日：2003-01-15

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Il-Joo Cho ,  Kwang-Seok Yun ,  Euisik Yoon

IPC: H01H051/22

CPC classification number: G02B26/085 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/904

Abstract: Disclosed is a micromirror actuator having a two-axis freedom and actuated by an electromagnetic force and fabrication method thereof. The micromirror actuator includes a substrate, a frame configured to be connected with the substrate, a micromirror configured to be connected with the frame, first and second torsion bars connecting the substrate with the frame, third and fourth torsion bars connecting the frame with the micromirror, four interdigitated cantilevers configured to be connected to the substrate, four connecting bars connecting the four interdigitated cantilevers with the frame, interconnection lines formed on the four interdigitated cantilevers and the micromirror, and first and second magnets installed outside the substrate. since the micromirror actuator of the present invention can be actuated around two axes by electromagnetic force generated by electromagnetic field applied from outside, it is possible to obtain large force and large rotational angle. In addition, the micromirror actuator has a mechanically robust structure endurable against external impact, and is operable at a low voltage of 5V or loss. Further, it is possible to obtain a flat mirror surface sine the upper silicon layer of the SOI substrate is used as the mirror surface.

Abstract translation: 公开了一种具有双轴自由度并由电磁力驱动的微镜致动器及其制造方法。 微镜致动器包括基板，被配置为与基板连接的框架，构造成与框架连接的微镜，将基板与框架连接的第一和第二扭杆，将框架与微镜连接的第三和第四扭杆 配置为连接到基板的四个交叉悬臂，连接四个交叉悬臂与框架的四个连接杆，形成在四个叉指悬臂和微镜上的互连线，以及安装在基板外部的第一和第二磁体。 由于通过从外部施加的电磁场产生的电磁力可以使本发明的微镜致动器绕两个轴致动，所以可以获得大的力和大的旋转角度。 此外，微镜致动器具有耐外部冲击的机械坚固结构，并且可在5V或低损耗的低电压下操作。 此外，可以获得使用SOI衬底的上硅层作为镜面的平面镜面正弦。