公开(公告)号：US20240001403A1

公开(公告)日：2024-01-04

申请号：US18255070

申请日：2021-12-02

Applicant: Korea Advanced Institute of Science and Technology

Inventor： Hyun Joo Lee ,  Sang Mok Lee ,  Gichan Yun

IPC: B06B1/02

CPC classification number: B06B1/0292

Abstract: Disclosed are a capacitive micromachined ultrasonic transducer having an adjustable bending angle and a method for manufacturing same. The ultrasonic transducer according to one embodiment may comprise: a substrate; a plurality of transducer elements spaced apart from each other and stacked on top of the substrate; flexible hinges which are positioned between the plurality of transducer elements and formed so as to pass through the substrate; a first polymer layer formed so as to cover the bottom of the substrate; and an actuator layer formed under the first polymer layer.