公开(公告)号：US10209628B2

公开(公告)日：2019-02-19

申请号：US15285111

申请日：2016-10-04

Applicant: KLA-Tencor Corporation

Inventor： Prasanti Uppaluri ,  Thirupurasundari Jayaraman ,  Ardis Liang ,  Srikanth Kandukuri ,  Sagar Kekare

IPC: G06F17/50 ,  G03F7/20

Abstract: A method for automatically classifying one or more defects based on electrical design properties includes receiving one or more images of a selected region of a sample, receiving one or more sets of design data associated with the selected region of the sample, locating one or more defects in the one or more images of the selected region of the sample by comparing the one or more images of the selected region of the sample to the one or more sets of design data, retrieving one or more patterns of interest from the one or more sets of design data corresponding to the one or more defects, and classifying the one or more defects in the one or more images of the selected region of the sample based on one or more annotated electrical design properties included in the one or more patterns of interest.

公开(公告)号：US20170344695A1

公开(公告)日：2017-11-30

申请号：US15285111

申请日：2016-10-04

Applicant: KLA-Tencor Corporation

Inventor： Prasanti Uppaluri ,  Thirupurasundari Jayaraman ,  Ardis Liang ,  Srikanth Kandukuri ,  Sagar Kekare

IPC: G06F17/50

CPC classification number: G03F7/7065 ,  G03F7/70658 ,  G06F17/5081 ,  G06F2217/12

Abstract: A method for automatically classifying one or more defects based on electrical design properties includes receiving one or more images of a selected region of a sample, receiving one or more sets of design data associated with the selected region of the sample, locating one or more defects in the one or more images of the selected region of the sample by comparing the one or more images of the selected region of the sample to the one or more sets of design data, retrieving one or more patterns of interest from the one or more sets of design data corresponding to the one or more defects, and classifying the one or more defects in the one or more images of the selected region of the sample based on one or more annotated electrical design properties included in the one or more patterns of interest.